Used ULVAC EBX-10D #293621576 for sale

ULVAC EBX-10D is a planetary gear-type, two-stage turbo molecular vacuum pump system, designed to create a high-vacuum environment during the processing of reactor substrates. EBX-10D combines the superior performance of planetary gears with turbomolecular pumps, making it an ideal choice for demanding vacuum processes in the semiconductor, optical disk and display industries. ULVAC EBX-10D utilizes a two-stage throttle-type turbo pump, which enables a vacuum pumping speed of 3.2 x 10-2 Pa liter/s, resulting in an ultimate pressure of 5 x 10-7 Pa TM (Torr). This is accomplished through the adoption of a variable controller, making EBX-10D the fastest among other turbo molecular pumps in its class. The variable controller adjusts the maximum rotating speed of the turbo pump from 400 r/min up to 1200 r/min, allowing for superior flexibility and performance. In addition, ULVAC EBX-10D is equipped with a high-performance planetary reduction gear, which is capable of suppressing the torque fluctuation at the rotary inlet port of the turbo pump in order to reduce vibration. This feature ensures stable operation, even when the motor speed is rapidly changed. Furthermore, the planetary gear reduces the noise of the motor, allowing for quiet operation and reducing the load on the interior of the chamber. Moreover, EBX-10D offers a variety of features designed to make operation and maintenance as straightforward as possible. The internal fan assembly can be easily removed for cleaning, and the exhaust temperature is monitored to prevent over-heating. The lube oil reservoir can be easily accessed and supplemented, and the controller monitors both the external and internal temperature of the pump. Additionally, ULVAC EBX-10D incorporates a number of safety features, such as a Liquid Crystal Display (LCD) unit and a safety valve, to ensure user safety at all times. Overall, EBX-10D is an exceptional reactor system, offering outstanding performance and ease of maintenance. It is ideal for handling challenging vacuum processes, and its impressive speed and low vibration capabilities ensure reliable and consistent operation. Moreover, its sensible safety measures further make it a top-of-the-line choice for any reactor system.