Used ULVAC EBX-10D #9102139 for sale

Manufacturer
ULVAC
Model
EBX-10D
ID: 9102139
Deposition system.
ULVAC EBX-10D is a multifunctional, third generation, EB plasma source with a high-power plasma process, and is well suited for a wide range of used industrial applications. This reactor is capable of producing very high temperature plasma. It is powered by a combination of electron beam (EB) and an externally supplied electrons at an energy of 10 MeV. EBX-10D features a low-voltage power supply, which allows it to supply a very high electron beam acceleration power. In addition to its high-power plasma process, ULVAC EBX-10D enables users to execute a variety of processes, such as sputtering, etching, layering, and the production of reactive ion-exchange species. Furthermore, EBX-10D provides a very wide range of control settings, which permits customizability on a process basis, for better process control and optimization. It is designed with safety in mind, as it features an emergency interlock system and overvoltage protection. ULVAC EBX-10D is capable of achieving temperatures of up to 15,000ºC within its main chamber. It is equipped with a quartz window on the outside of the chamber, which allows for a continuous view of the plasma formation. Also, this reactor features an environmental control system, which makes it easier to preserve the integrity of the process environment. EBX-10D is highly adaptable due to the modular design, which allows for a variety of interchangeable components that can be mounted to it. The reactor is equipped with a rotation motor which makes it possible to rotate substrates during sputtering or etching processes in order to create more uniform deposition. Additionally, ULVAC EBX-10D features an ultra-high throughput design, which allows a very high load capacity, making it optimal for use in reactors capable of handling large batches of substrates. EBX-10D is cost-effective, making it attractive for industrial applications. It is safe, reliable, and highly reliable, making it the perfect choice for a wide range of industrial needs. Not only is it strongly capable of managing a wide range of processes, but it also provides users with a great level of control that permits for customizability, which is very important in industrial processes.
There are no reviews yet