Used ULVAC EBX-8C #9053841 for sale

ULVAC EBX-8C is a low-pressure electron beam (EB) reactor designed for specific industrial applications. It is a compact, in-line, medium-powered, EB-based coating system that provides precise and high-precision thin film deposition. EBX-8C is a high-performance reactor with superior features such as a highly streamlined design, low energy consumption, and a small footprint. ULVAC EBX-8C can operate at both low- and high-vacuum pressures with a process chamber that can reach a working vacuum pressure of 10⁻¯6 to 5.0E-4 Pa. This ensures precise control of the deposition parameters such as uniformity and layer thickness. The reactor also features an extremely low base pressure, which is below 10⁻¯7 Pa. This allows for low residual pressure interference in the process chamber and near-equal particle trajectory. EBX-8C uses an EB source, connected to a gun assembly, which is fed into a special chamber filled with the desired working gas. The EB source is composed of a filament, control grids, acceleration distance, and collector electrodes. The EB source can be adjusted to provide the necessary voltage and energy levels for optimal film deposition. The acceleration distance is adjustable, allowing for fine control of the beam energy. Within the process chamber, the EB beam is directed to the workpiece using optical components such as a focusing lens and a turret. The workpiece is placed on a rotatable substrate stage and is held in place with a vacuum clamping system. The baffles process chamber ensures a high uniformity of the deposited film even in difficult geometries with high aspect ratios. ULVAC EBX-8C features a fully automated process operation and advanced control electronics. An interactive programmable logic controller (PLC) offers four different modes of operation for acceleration and total acceleration time. It also offers several safety controls, including temperature, back pressure, chamber pressure, and others. EBX-8C has a power rating of 8 kW and can operate within a temperature range of 0 to 380C. ULVAC EBX-8C is equipped with a wide range of accessories and spares such as additional lenses, workpiece holders, protective shields, cooling systems, target stages, and others. This ensures reliable and efficient operation and maintenance of EBX-8C.