Used ULVAC EBX-8C #9397455 for sale

ULVAC EBX-8C is a single-ended, batch processing, highly reactive equipment for applications in thin film industries. This reactor is used for a wide range of processes, such as bonding, sputtering, thin-film formation, chemical vapor deposition (CVD) and plasma-enhanced CVD (PECVD). The system's unique graphical user interface, UwinTM, allows for fast and easy process parameter previewing. EBX-8C features a microprocessor-controlled, 300 mm (1.2") diameter reaction chamber, with a 300 mm openable electroslag-sample chamber. The unit's multiple process chambers enable efficient and high throughput processing, and provide excellent environmental compatibility. ULVAC EBX-8C's multi-zone temperature management machine ensures high quality thin films under closely-stable process parameters. A tunable frequency-controlled, 1300 W direct current RF generator is also included in the EBX, allowing up to 300MHz of tuning range. EBX-8C features a high-accurate gas feed gas analysis tool with oxygen and chlorine nitrate monitored quickly on the LCD display. ULVAC original optional asset controller provides a wide range of sophisticated control functions, such as air and water interlocks, reactant gas flow measurement and dew point control, as well as vacuum and pressure control. The EBX is further equipped with an evacuated transfer chamber and a load lock model. This ensures a dust free environment and prevents exposure of the reaction chamber to outside environment, making the EBX an ideal choice for low-defect processing. ULVAC EBX-8C has also undergone EMC testing for compatibility to 7 major standards and is certified for a range of CE applications, making it ideal for safe industrial applications. To ensure safety, EBX-8C shares many features with ULVAC series of other batch sputtering systems. This includes the air and water interlock systems, emergency shut-down switches and vacuum interlocks. ULVAC EBX-8C's 20 programmable function control equipment also allows users to further customize the reactor's parameters to suit their process needs. In conclusion, EBX-8C is a highly productive and versatile reactive system, designed for processing a range of high-precision thin-film processes. Its unique graphical user interface, coupled with a range of advanced safety features and sophisticated process control systems, makes it an ideal solution for a range of batch processing applications.