Used ULVAC VPC-260 #9296182 for sale

ULVAC VPC-260 is a low voltage capacitive discharge (CD) reactor commonly used as a source of plasma. This type of reactor is ideal for processes such as etching, deposition, and surface modification. VPC-260 is equipped with a digital work controller (DWC), allowing users to precisely control process parameters such as the voltage, pulse duration, and capacitance settings. ULVAC VPC-260's chamber is constructed with stainless steel and nickel plated copper. A quartz window in the top of the reactor allows the user to monitor plasma conditions in real time, while the reactor's temperature range of 30 to 200 °C helps prevent overheating during long process runs. VPC-260 is also equipped with an airlock mechanism for introducing sansrogen gas into the chamber. The airlock helps reduce the risk of contamination, as the process gases never reach the main chamber. ULVAC VPC-260 utilizes a double pulse mode of CD that helps generate high flux densities of ions and radicals from the plasma, as well as high powers from low input energies. The low input energy also helps reduce the wear-and-tear of the reactor's electrodes compared to other plasma sources. VPC-260 has been demonstrated to be compatible with a wide range of substrates, such as polysilicon, glass, and gallium arsenide. ULVAC VPC-260 also features a gas-free operation, meaning no upstream gas handling equipment is required. This makes it an ideal choice for a variety of processes, especially those in a laboratory setting due to its space-saving design and ease of operation. Overall, VPC-260 is a reliable and versatile CD reactor that provides great flexibility for a variety of plasma applications and processes. With its high powers, low input energies, and gas-free operation, this reactor is capable of meeting the needs of many applications.