Used ULVAC ZX-1000 #9237358 for sale

ULVAC ZX-1000
Manufacturer
ULVAC
Model
ZX-1000
ID: 9237358
Wafer Size: 8"
PVD System, 8" (5) Chambers Preclean PZT Pt Loadlock.
ULVAC ZX-1000 is a high-temperature, low-vacuum, plasma reactor designed for flexible and efficient operation. This reactor is capable of achieving up to 1000°C temperatures under a low-vacuum environment, which provides an ideal atmosphere for various advanced processing and material synthesis tasks. It is also designed to be adaptive for a wide range of process applications, materials, and processes. ULVAC ZX 1000 is built with a radial magnetic field that is perpendicular to the plasma source, which is a combination of an electron cyclotron resonance equipment and an inductively coupled discharge source. This combination creates an ideal low-vacuum environment and provides high-density plasma. This reactor was also designed to minimize thermal interference by having low levels of secondary electrons emitted. ZX-1000 is equipped with an ultra high-speed digital power supply system. This unit enables precise power control and efficient operation. Additionally, the reactor is designed to have a low operating temperature, which reduces heat losses and minimizes the heat load onto the surrounding components. ZX 1000 has several safety features, such as its temperature control machine which prevents excessive temperatures during operation. It also has emergency shutoff capabilities, and other safety features such as fire resistant wiring and chemically inert sealants. The unique design of ULVAC ZX-1000 enables a wide range of applications including hardening treatment, thin film deposition, and sputtering. Furthermore, its design can be adapted to any experimental technique that requires a low-vacuum environment, due to its proper temperature control, high-density plasma, and precise power settings. ULVAC ZX 1000 is an ideal production machine for creating and maintaining quality materials for a variety of applications.
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