Used VEECO / EMCORE D180 GaAs #9031463 for sale

Manufacturer
VEECO / EMCORE
Model
D180 GaAs
ID: 9031463
Vintage: 1999
MOCVD System Throughput: 6" x 2" MO Sources: TMAl-1, TMGa-2, DEZn-1, TMIn-1, CCl4-1 Hydride sources: PH3, AsH3, H2, N2, Si2H6, H2S Epison III for TMIn IEM (GB) 1999 vintage.
VEECO / EMCORE D180 GaAs reactor is a production grade advanced vapor deposition tool for processing applications in the semiconductor industry. This reactor enables high-volume, consistent production of high quality, GaAs-based components and materials for use in a range of applications, such as photonic, solar cells, and optoelectronic devices. The equipment is composed of three main components: the vacuum deposition chamber, the vaporization chamber, and the exhaust coating. The vacuum deposition chamber houses the substrate, mounted on the substrate holder, and is used for accommodating evaporation, sputtering, and other film deposition processes. The chamber is equipped with in-situ quartz view ports, allowing real-time monitoring of the growth processes. The vaporization chamber is used for the supply of source material, which is then delivered to the substrate. Gases can be admitted into the chamber to assist or modify the deposition process. The exhaust coating helps maintain a uniform vacuum pressure in the deposition chamber, which ensures optimum process conditions for material deposition. VEECO D180 GaAs reactor is designed to operate under a wide temperature range, up to 550 degrees Celsius, enabling high-temperature vapor deposition and electroplating of metals, including gold, aluminum, and copper. The system has a fast deposition rate, enabling for a high throughput of components. The reactor is equipped with a standard USB port for communication with other machines or controllers. The unit also features embedded processing, including video streaming, synthesis of metallic salts, and direct control of deposition rates, allowing for automated control of the deposition processes. The machine meets all safety standards and features an advanced safety design, including an integrated process control, water cooling, safety measures, and emergency shutoff systems. EMCORE D180 GaAs reactor is easy to use, with readily available maintenance services. A wide range of materials and components can be processed with the tool, further expanding the range of applications and enabling more efficient production of semiconductor-based components.
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