Used VEECO / EMCORE D180 #9178724 for sale

VEECO / EMCORE D180 is an atmospheric pressure plasma reactor, designed for positive ion implantation and deposition of oxides, nitrides, metals, and silicides. It features a long ovoid chamber that facilitates uniform gas distribution using a pair of swirling deflector plates. Its flexible design allows for easy modification and provides excellent process uniformity and repeatability compared to traditional cam-driven designs. The reactor is equipped with two graphite electrodes of variable size and shape to accommodate different implant requirements. The internal insulation ensures higher process ionization and increased implant intensity compared to traditional ion guns, while the featured self-biasing emitter maintains a stable electrical discharge even during large process deformations. The main plasma source utilizes inductive coupling to ionize a wide range of process gases, and includes process control and data acquisition hardware. The end faces of each electrode are slotted to increase the magnetic field that separates electrons from the ionic species. The amount of the magnetic field required to achieve plasma stability increases with increasing chamber radius, ensuring that the total plasma density is consistently uniform throughout the entire chamber. VEECO D180 features an advanced gas supply system with mass flow controllers for precise gas delivery and selection. The gas mixtures can be changed in real-time, and automatic pressure regulation maintains precise control over the chamber pressure and substrate temperature. The system captures all current and voltage data during a run for full process monitoring and control, and can also be externally monitored via an Ethernet connection. Finally, the system can be connected to an annealing oven, allowing for the post-annealing of samples. The low operating temperatures and advanced emission control mechanisms minimize environmental impact. As a result, EMCORE D-180 is a cost-effective and environmentally friendly plasma deposition equipment, with excellent deposition characteristics and process capabilities.