Used VEECO / EMCORE D180 #9224745 for sale

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Manufacturer
VEECO / EMCORE
Model
D180
ID: 9224745
MOCVD System, 2" Process: GaN.
VEECO / EMCORE D180 is a state-of-the-art reactive ion etching (RIE) reactor designed for nanoscale deposition applications. This high-performance equipment combines the latest technology in vacuum deposition and etching with advanced control algorithms to deliver reliability and precision. VEECO D180 is capable of realizing complex structures and structures with nanometer accuracy. EMCORE D-180 features a advanced dual-source shielding architecture design to ensure a more spatially uniform etch profile. This design, along with the uniformity of the multi-wafer susceptibility coils in the electron beam column, results in superior layer uniformity and repeatability over substrates. D-180 also includes a unique gas system design that ensures uniform gas flow throughout the deposition chamber for enhanced process control. The unit's high-speed rotation of the wafers allows for consistent product deposition, increasing process reliability. In addition, the chamber is equipped with a wide variety of device-friendly components such as thermistors, gas sensors, diaphragms, and heaters for precise temperature control and precise gas delivery to the chamber. The machine can also control the intensities of its electromagnetic fields, and can even adjust the Energy Dispersive X-ray (EDX) beam. EMCORE D180 is highly configurable and comes with additional features such as a flexible process software, low-noise fan systems and an automatic wash station. All of these features combined with VEECO proprietary design and quality engineering allow D180 to be used for precise etching and deposition of nanoscale structures. Furthermore, the tool can support up to six plasma sources at each process station, allowing for improved performance and flexibility of the machine. VEECO D-180 can also achieve speeds of up to 400 mm/min for high-throughput applications. It is equipped with a diagnostic chamber that enables detailed diagnostics and fine tuning of processes, eliminating the need to acquire specialist operating/maintenance technicians. By utilizing the asset's advanced design and technology, VEECO / EMCORE D-180 can be used to produce nanostructured materials and layers, enabling manufacturers to create high-performance products and components. VEECO / EMCORE D180 is a highly advanced model that can deliver consistent, reproducible performance and quality for a variety of nanoscale applications.
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