Used VEECO / EMCORE E400 Gold As/P #9155030 for sale
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ID: 9155030
MOCVD systems
MO Source line : ( Normal x 7 / Dopant x 2 )
CBr4, DEZn,TESb,TMIn-1,TMIn-2, TMAl,TMGa-1,TMGa-2,IBuGa
Hydride source line: AsH3 x 2 ,PH3 x 2 ,Dopant A x 1,Dopant B x 2,Dopant C x 1
Epison III x 2 for TMIn
Currently de-installed
2000-2001 vintages.
VEECO E400 Gold As/P is an advanced reactor for thin film processing and deposition in semiconductor engineering. This As/P reactor is designed to provide both high performance and cost-efficient processing for a wide range of materials, including both organic and inorganic thin films. The As/P reactor is a four-sided quartz tube with a two-stage programmable platform. Each of the four sides of the quartz tube is heated by an induction coil, allowing for precise temperature control and uniformity. The first stage of the platform consists of three main component, namely, the bottom quartz shield, the middle quartz shield, and the quartz liner. The bottom quartz shield protects and insulates the chamber from the heat generated by the induction coils, while the middle quartz shield protects the liner from the fuel gas. The quartz liner is the second stage of the platform and is made up of an array ofGraphite furnace electrodes, each of which is connected to the power supply by a set of wires. The Graphite furnace electrodes enable more efficient deposition of thin films in a more uniform manner. The E400 Gold As/P also features an automated pulse generator, which can be programmed to provide various sequences of on-off pulses to the induction coils for deposition of thin films. This feature eliminates any manual setting of the power supply, further increasing the efficiency and accuracy of the machine. Furthermore, the E400 Gold As/P is equipped with a built-in camera system to observe and monitor the deposition process and provide real-time feedback for any adjustments needed. The E400 Gold As/P is a powerful and versatile system designed to meet the needs of various industries, including semiconductor, microelectronic, chemical, and optical device fabrication. It is widely used in research and development laboratories, as well as production facilities, due to its ability to produce high-quality thin films. The machine's programmable platform further enables it to be used for a wide range of applications, including oxide and nitride deposition, metal film deposition, LED fabrication, MEMS fabrication, and many other processes. The improved efficiency, accuracy, and quality offered by the E400 Gold As/P make it an ideal choice for the present-day industrial applications.
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