Used VEECO / EMCORE E400 #293641832 for sale

VEECO / EMCORE E400 reactor (also known as a Chemical Vapor Deposition Equipment) is a high temperature, ultra-high vacuum horizontal deposition system capable of producing high quality poly-crystalline and amorphous thin films for high-temperature and other applications. It is a multi-functional unit featuring a Reactive Ion Etch process to produce etched patterns in dielectric layers, as well as a rapid Thermal Annealing Process for amorphous layers. VEECO E400 features a 4 inch wafer chuck with a 20-inch aluminum chamber and multi-axis Kenics feed-through for the deposition sources. The pressure inside the reactor is adjustable and meet requirements for ultra-high vacuum deposition processes. The reactor also includes pre-deposition choices with a mechanical shutter, rotating sample module, and automated sputtering machine. Additionally, EMCORE E400 is equipped with an ion energy source to a clean and activate the substrate prior to deposition and etch processes. E400 reactor is designed to deposit Super Conductor and other high-temperature material. The deposition source is capable of functioning at temperatures up to 400°C. VEECO / EMCORE E400's design is specifically made to produce very thin layers of material with a low deposition temperature to ensure the highest process repeatability. The Ion Energy Source is capable of providing Ion bombardment up to three times a second, with a maximum current of 1-10mA. VEECO E400 is an ultra-high vacuum processDeposition tool with exceptional process control. It has the ability to deposit a wide range of thin film materials, from poly-crystalline and amorphous to Super Conductor. The asset's ease of operation, repeatability, and accuracy make it ideal for research and commercial applications. EMCORE E400 can process a variety of substrate sizes and materials, including glass and quartz, for patterning and the deposition of high temperature optical thin films. The model is further customizable by adding RF options and automated pre-cleaning and post-cleaning modules.