Used VEECO / EMCORE E400 #9029117 for sale
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ID: 9029117
MOCVD System
Configured for GaN process
E400 As/P
GaAs: 42" x 2"
(7) MO Source lines
Sources: TMIn-1, TMAl-1, TMAl-2, TMGa-1, TMGa-2, DETe, Cp2Mg
Hydride source line: AsH3, PH3, Dopant A
Epison III for TMIn-1.
VEECO / EMCORE E400 reactor is an advanced type of chemical processing device that is used for multiple processes including doping, etching, and deposition of materials. VEECO E400 can be used for a variety of processes, ranging from semiconductor-based applications, such as BOSCH, CVD and ion implantation, to the deposition of materials, such as metals and oxides. EMCORE E400 is a fast and efficient reactor, with a high throughput, great turn-around times, and a top-tier process quality. E400 features a patented multi-chamber design that allows for the highest-stakes processes to be accomplished at extremely efficient rates with a low thermal budget. This reactor design is also easy to scale up or down, allowing it to be used for a wide range of processes. VEECO / EMCORE E400 has an onboard hot-stage quartz cover that supports both plasma and thermal processing. It is also outfitted with advanced vacuum techniques that enable precise control of the process chamber. Additionally, VEECO E400 reactor is outfitted with an adjustable high-temperature energy source that enables controlled deposition of materials. An advanced gas manifold equipment makes it easy to make quick changes and provide accurate and controlled flows of gases. This reactor is fitted with a reliable, automated material delivery system that is simple to use, as well as efficient. It also has a robust temperature control unit for precise tuning of the processing conditions without costly discharge or downtime. EMCORE E400 is equipped with an intuitive human-machine interaction interface that allows easy operation of the device. E400 is equipped with advanced data logging and analysis software that helps users evaluate their processing results and detect potential processing problems. This feature helps make VEECO / EMCORE E400 a reliable and consistent reactor that can produce consistent and repeatable high-quality results. In general, VEECO E400 is an advanced and effective reactor that is well suited for semiconductor-based applications. It is an all-in-one unit that combines high efficiency, precise control, and reliable performance with a robust and reliable user-friendly interface. EMCORE E400 is an invaluable part of any chemical processing machine who are looking to optimize their production and processing results.
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