Used VEECO / EMCORE E450 #9394988 for sale
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ID: 9394988
Vintage: 2008
System
Process: GaAs
Product: GaAs LED (Red and yellow)
Config: TMAl, TMGa, TMIn, AsH3, PH3, Mg, Si
Spare parts:
Qty / Part number / Description
(1) / 1092679 / 50x2" Pockets wafer carrier
(1) / 1090650 / 13x4" Pockets wafer carrier
(1) / 1090581 / 21x3" Pockets wafer carrier
(5) / 1091270-1016-D-B / MFCs 30 SLM
(3) / - / PLC Control circuit boards
(4) / - / Filters
(1) / 1003794 / Heater base E400
(1) / 1016491 / Baffle EII
(1) / 1003780 / E400/E300 Spindle
(1) / 1016306 / Bottom heat shield EII
(1) / 1016307 / Top heat shield, EII
(1) / 1029697 / E450 Filament, outer
(1) / 1005630 / E400 Filament, middle
(1) / 9406E01 / ISOI00 Turbo pump
(1) / 1005552 / -
(1) / 1022551-1003 / E450 Screen diffusion, (2) Port photo ETC
(1) / 1022549 / Ring reactant level
(4) / 1003641 / Outer ring segment 9400 Flow flanges
(1) / 1002115 / VlV Gate pneu, 4"
(1) / 1016457 / E11 Susceptor moly
(3) / 1084355 / MKS 1000T CT27 Baratron, DNET
(4) / 1004766 / Feed through linear motions, 2.75 modification
(1) / 1003932 / Graphite bushing assembly
(4) / 1094048 / Bracket mounting holy shutter
(7) / 9472E01 / Control SSP, 15 Amp, 200-240 V
(8) / 1016309 / 9400 Heater support
(1) / 1013965 / k400 Heater support
(6) / 1005612 / Electro particle shield
(1) / 6403E02 / Fuse sub mini, 3A
(2) / 1003680 / MKS 1000 Torr
(1) / 1026320 / Drive motor, 1/3 HP, 180V, CDP3316 Baldor
(4) / 1004103 / E400 Baffle support
(2) / 1016308 / Electrode connector block outer heaters
(4) / 1003039 / Gaskets silver, 2.75 inch
(2) / 10446 / Gasket Cu Gr, 2.75 x 20.0 Belo/Bon
(4) / 1015365 / VCR Filter, (20) Microns
(24) / 1017391 / Screws
(24) / 6030E01 / Screws
(16) / 6099E03 / -
(16) / 1017391 / Screws
(6) / 6030E04 / Screws
(1) / 1084220-1002 / Screw
(16) / 1084220-1003 / Screws
(6) / 1017392 / Screws
(3) / 6045E01 / Screws
(1) / 6012E02 / Screw
(8) / 6094E03 / Washer locks
(1) / 1022820 / O-Ring, 30"
(1) / 1025867 / O-Ring
(1) / 1084972 / E450 Reactor insert holy
(1) / 10447 / Gasket
(1) / 1002703 / Ball valve, 4"
2008 vintage.
VEECO / EMCORE E450 Reactor is a surface mount equipment designed for the deposition process of thin film and semiconductor materials. It features a 3.3 kW electron-beam gun and a 5.5 kW RF source as standard configuration. VEECO E450 offers a wide range of operating parameters including a range between 0.2 to 800 W of power, range of substrate temperature of 20 to 400 degrees Celsius, and chamber pressure of 10-6 to 10-7 mbar. The RF plasma source creates a control of the film deposition process, and has the highest frequency available for film growth. It provides ultrahigh vacuum quality that surpasses international standards. Furthermore, EMCORE E450 has recently adopted a new PC control system that increases the operational efficiency and reduces maintenance costs. With its advanced and enhanced elements, E450 can be utilized for a variety of applications, including rapid thermal processing, photolithography, chemical vapor deposition, sputtering, and thin-film deposition. Additionally, this model of reactor is very flexible as it can be configured with multiple chambers for a variety of process development. The system also features unlimited program storage capability, real-time display of vacuum data, cycle sequencing capability, and a graphical user interface. VEECO / EMCORE E450 Reactor is an efficient and user friendly solution that minimizes cost by reducing the need for multiple machines for different technologies. Its advanced design and flexible capabilities make it an ideal choice for a range of applications and allow for rapid turnaround times. The intuitive controls provide users with exact control over process parameters, making it an ideal tool for research and production. With the introduction of VEECO E450 Reactor, users can expect increased productivity and reliability while simultaneously reducing cost and energy consumption.
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