Used VEECO / EMCORE K465 #293768292 for sale
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ID: 293768292
Vintage: 2007
MOCVD System
(2) Dry pumps
(4) Boxes
(2) Exhaust exchangers
Filter
Frame
Growth chamber
L Chamber
2007 vintage.
VEECO / EMCORE K465 is a high efficiency, ultra-thin film reactor designed for epitaxial growth of compound semiconductors such as III-V and II-VI materials. It is equipped with advanced process control and monitoring systems, allowing for precise and repeatable deposition processes. VEECO K465 utilizes a closed-tube design that provides a rapid growth environment with minimal contamination, resulting in optically and electrically superior layers with fewer dislocations. It also features a pumping equipment that maintains a clean process chamber atmosphere during deposition and a gas manifold for precise control of the pressure and Flow rate inside the chamber. The advanced process control system of EMCORE K465 streamlines the deposition process by automating the training and setting of the substrate temperature, process pressure, gas flow, and other parameters. This ensures a higher level of repeatability, even when using different substrates or gases. The unit is also capable of monitoring the film deposition rate in real-time, which allows for better process control and optimized results. K465 reactor provides excellent process uniformity and reproducibility, resulting in top-quality epitaxially grown layers. It features a high containment capacity with a small footprint, making it ideal for laboratories with limited space. Multiple reaction chambers can also be used in parallel to increase throughput. In addition, VEECO / EMCORE K465 provides exceptional value with its low operating costs and energy consumption. The advanced process control machine results in quick and consistent process cycles, resulting in fewer process repetitions and lower energy consumption. The high reliability and consistent results also minimize downtime and enable extended operation. VEECO K465 is designed to provide reliable epitaxial growth for high throughput industrial applications. It is an ideal tool for fabrication of compound semiconductor materials and devices, making it a great asset for research and industrial applications.
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