Used VEECO / EMCORE K465i #293585758 for sale

VEECO / EMCORE K465i Reactor is a state-of-the-art matero-electronic production tool designed for the mass production of devices used in the semiconductor and other industries. The reactor utilizes a high voltage plasma, which enables the production of ion implanted devices. The tool has active-area control (AAC), which allows the operator to control the implant parameters. The design also provides excellent repeatability and uniformity of the filling. VEECO K465i reactor is designed to operate at high voltages between (+)75 and (-)75 kV. This allows for a high ion acceleration which offers a wide range of ion implantations for various materials and temperatures. The design also includes multi-axis scanning of the wafer enabling the production of a wide variety of active-area shapes. Additionally, the tool utilizes an XP-27 deposition system and a DC-450 evacuation chamber to provide excellent wafer cleanliness under high vacuum conditions. EMCORE K465i reactor is also provided with an Enhanced Photon Source (EPS) for ultra-violet illuminations. This source enables a wide range of environmental crystallization processes for materials like silicon, GaAs and GaN. The tool also offers a high peak ion flux of up to 8,000 ions/cm2 which allows for a high throughput even at smallest submicron feature sizes. K465i reactor also provides automatic wafer tracking to facilitate a high degree of accuracy of the tool's operation. It includes an extensive wafer mapping capability which can identify the exact spatial location of the wafers and will automatically choose the optimum parameters for each exposure. This reduces the time necessary for pre-calibration and ensures maximum yield. VEECO / EMCORE K465i reactor also features an advanced embedded user interface that simplifies the setup and operation process and provides reliable information regarding the process parameters, equipment diagnostics and other key performance indices. The tool also comes with a soft maintenance system that gives the operator a real-time view of the operation, making support easier. Overall, VEECO K465i Reactor is an excellent and reliable production tool which is ideally suited for the industrial production of high volume wafers. Its wide range of features makes it an ideal choice for high volume production and repeatable quality result.