Used VEECO / EMCORE K465i #293608318 for sale

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Manufacturer
VEECO / EMCORE
Model
K465i
ID: 293608318
MOCVD Systems Type: GaN.
VEECO / EMCORE K465i Reactor is a multi-coated, high power optical epitaxial growth equipment designed for use in the production of optoelectronic materials. This system is the result of a successful partnership between two globally renowned innovators in the semiconductor technology industry. Featuring a heated ceramic susceptor capable of up to 1625°C operation and a large, stainless steel reaction chamber, VEECO K465i is well suited for a wide variety of production processes. The unit is capable of processing a multitude of substrates, such as GaAs, InP and AlGaAs, and provides a versatile, homogenous deposition environment for both MBE and MOCVD processes. It also boasts a number of specialized features designed to facilitate fast and accurate epitaxial growth, including internal gas flow control, wafer position sensors, automated on-machine cleaning and a hot-wall structure. EMCORE K465i is supported by an advanced motion machine that includes a unique dual-stage lift, which allows for either 2-axis or 3-axis movement of the susceptor and in-situ patterning with a stepper motor. Additionally, ion implantation can be achieved via an integrated ion source unit, which provides an uniform depth profile and eliminates the need for a separate implanter. K465i also comes with a robust control software suite, allowing users to easily program and control the reactor's chamber conditions, processes and recipes. The software also includes a set of advanced signal analysis tools that allow for real-time monitoring of the reactor chamber and wafer conditions. Overall, VEECO / EMCORE K465i Reactor offers a reliable, cost-efficient solution for those looking for high-performance, market-ready optics. With its numerous options for customizing the deposition parameters, as well as its strong safety and reliability profile, the tool is ideal for producing a wide range of optoelectronic materials and components.
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