Used VEECO / EMCORE K465i #9043781 for sale
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ID: 9043781
MOCVD-GaN system, 6"
K465i GaN MOCVD Reactor
K465i Heater Assembly
Wafer Handling Assembly
Laminar Flow Hood
Ebara ESA-25D Pumps
User Interface Swing Arm
Rotary Transfer Assembly
Electronics Control Module
Circuit Breaker Panel 380 VAC
Supply Gas Sub-Assembly
GaN Standard 2xN2, 1xH2 regulator, 2 N2/H2 outputs
All bubblers as quoted
All Slices as quoted
Liquid Refigerator Baths
In-Situ Monitoring System
DRT 210 Real time In-Siture monitor systems
Integrated Electronics Assembly
Model Based Temperature Control
Flow Flange Lift Kit
SECS/GEM
Spare Wafer Carriers 5x6 Qty. 2
MV Particle Filter Maintenance Kit
Filament Maintenance Kit Gen IV Out
Filter Cart Assembly MV KF40
Pyro Kit
Systems utilize shared scrubber, scrubber not included
CE Mark
Tool is currently powered down and main lines are disconnected
2012 vintage.
VEECO / EMCORE K465i is a high-performance, molecular beam epitaxy (MBE) tool that has been designed for research, development, and production of compound semiconductors. This reactor provides a wide range of growth capabilities, including AlGaAs, InGaAs and InP, for applications such as high-speed optoelectronic ICs, data communication devices, sensors, and LED devices. VEECO K465i is the newest offering from VEECO in their line of MBE reactors, and it is an excellent choice for those looking for an advanced, high-precision MBE tool. EMCORE K465i is equipped with a high-capacity, multi-zone atmosphere control equipment that can precisely modify temperature and gas composition to provide uniform environment along the entire wafer. This system provides an optimal environment for substrates during sublimation and subsequent growth, and also helps minimize the formation of defects. K465i also features a 4-point sample stage for precise substrate movement. Additionally, a choice of source systems is available, including Knudsen cells, e-beams, and effusion cells. VEECO / EMCORE K465i provides a base pressure of 5 mTorr, while systems can be equipped with turbomolecular pumps for even lower pressures, such as 1 mTorr and 0.1 mTorr. This low base pressure helps reduce the likelihood of contamination while growth is underway. VEECO K465i also includes in-vacuum sample and shutter controls for improved process repeatability. The unit is furnished with specialized software for easy and intuitive control, and the software provides a graphical user interface for operating the MBE machine. EMCORE K465i provides an advanced, highly-modular tool that makes it ideal for applications requiring accurate control over growth proprieties. This reactor can also be equipped with a full range of accessories for a variety of applications. This includes, cryo-shower systems for ultra-clean growth, deposition monitoring systems, and load-locks for highly-repeatable condition maintenance. K465i is a highly versatile MBE tool that is perfect for production and research alike.
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