Used VEECO / EMCORE K465i #9043781 for sale

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Manufacturer
VEECO / EMCORE
Model
K465i
ID: 9043781
MOCVD-GaN system, 6" K465i GaN MOCVD Reactor K465i Heater Assembly Wafer Handling Assembly Laminar Flow Hood Ebara ESA-25D Pumps User Interface Swing Arm Rotary Transfer Assembly Electronics Control Module Circuit Breaker Panel 380 VAC Supply Gas Sub-Assembly GaN Standard 2xN2, 1xH2 regulator, 2 N2/H2 outputs All bubblers as quoted All Slices as quoted Liquid Refigerator Baths In-Situ Monitoring System DRT 210 Real time In-Siture monitor systems Integrated Electronics Assembly Model Based Temperature Control Flow Flange Lift Kit SECS/GEM Spare Wafer Carriers 5x6 Qty. 2 MV Particle Filter Maintenance Kit Filament Maintenance Kit Gen IV Out Filter Cart Assembly MV KF40 Pyro Kit Systems utilize shared scrubber, scrubber not included CE Mark Tool is currently powered down and main lines are disconnected 2012 vintage.
VEECO / EMCORE K465i is a high-performance, molecular beam epitaxy (MBE) tool that has been designed for research, development, and production of compound semiconductors. This reactor provides a wide range of growth capabilities, including AlGaAs, InGaAs and InP, for applications such as high-speed optoelectronic ICs, data communication devices, sensors, and LED devices. VEECO K465i is the newest offering from VEECO in their line of MBE reactors, and it is an excellent choice for those looking for an advanced, high-precision MBE tool. EMCORE K465i is equipped with a high-capacity, multi-zone atmosphere control equipment that can precisely modify temperature and gas composition to provide uniform environment along the entire wafer. This system provides an optimal environment for substrates during sublimation and subsequent growth, and also helps minimize the formation of defects. K465i also features a 4-point sample stage for precise substrate movement. Additionally, a choice of source systems is available, including Knudsen cells, e-beams, and effusion cells. VEECO / EMCORE K465i provides a base pressure of 5 mTorr, while systems can be equipped with turbomolecular pumps for even lower pressures, such as 1 mTorr and 0.1 mTorr. This low base pressure helps reduce the likelihood of contamination while growth is underway. VEECO K465i also includes in-vacuum sample and shutter controls for improved process repeatability. The unit is furnished with specialized software for easy and intuitive control, and the software provides a graphical user interface for operating the MBE machine. EMCORE K465i provides an advanced, highly-modular tool that makes it ideal for applications requiring accurate control over growth proprieties. This reactor can also be equipped with a full range of accessories for a variety of applications. This includes, cryo-shower systems for ultra-clean growth, deposition monitoring systems, and load-locks for highly-repeatable condition maintenance. K465i is a highly versatile MBE tool that is perfect for production and research alike.
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