Used VEECO / EMCORE K465i #9172349 for sale

VEECO / EMCORE K465i is a type of chemical vapor deposition (CVD) reactor designed for performing various thin film processes. This particular type of reactor is based on the cold wall design, and is mainly used in industries related to the optoelectronics/photonics. VEECO K465i designed has a wide range of capabilities for the deposition of organic and inorganic materials on various substrates, such as CMOS, glass, SiC, and GaAs. The substrate size supported by the reactor is up to 8 inch. It is composed of various components, including a body, a process chamber, a susceptor, a gas delivery system, and a host of power supplies and controllers. The aluminum body of EMCORE K465i provides mechanical support, while the process chamber is used to contain and evacuate the reactants and reaction products. An adjustable susceptor is attached to the top of the reaction chamber in order to securely hold and somewhat heat anthe substrates during the deposition process. The gas delivery system consists a mass flow controller (MFC) and a flow meter, which provide accurate metering and control for precursor and other reactant gases. A cluster of power supplies control the current flow through the heating elements of the reactor while the controllers are responsible for providing the desired temperature. Finally, the chamber of K465i is also outfitted with numerous monitoring systems such as a quadrapole mass spectrometer (QMS) to determine the composition of chamber gas and a reflectometer for monitoring the thickness of the films. Overall, VEECO / EMCORE K465i reactor provides an affordable and reliable means of performing CVD deposition processes for the optoelectronics/photonics industry. With its wide range of capabilities and adjustable components, VEECO K465i is suitable for a large variety of complex thin film processes.