Used VEECO / EMCORE K465i #9229288 for sale

VEECO / EMCORE K465i is a metalorganic chemical vapor deposition reactor (MOCVD) designed for liquid phase epitaxy (LPE) and oxide/nitride-based deposition. VEECO K465i is a high throughput tool ideal for industrial multi-layer applications such as LEDs, integrated optics, and thin-film transistors (TFTs). It features a tailored gas distribution equipment with individually controlled gas precursors and dynamic reaction zones for maximum uniformity of film deposition, as well as automated process control software for optimization of throughput and yield. EMCORE K465i is a split-tube vertical MOCVD reactor with a four-inch by two-inch reactor tube. It utilizes horizontal and vertical gas flow for uniform multi-growth throughout the wafer. Substrate heating can reach up to 700°C and the temperature can be uniformity maintained via a direct heating system and incorporated temperature sensors. Its three-stage turbo pump is capable of providing a high-level of vacuum for active species condensation and efficient reactive gas delivery. K465i is further supplemented with a high-precision automatic wafer transfer unit, an automated pressure balancing machine for controlling the reactor's pressure and flow, a customized lift mechanism, as well as automated gas sequencing for precise deposition control. It is furnished with high throughput and high-quality hardware components such as Prism crystals, in-situ monitoring, automated shadow masking, and a spectroscopy tool. VEECO / EMCORE K465i also includes an exhaust scrubber to reduce gaseous contaminants in the environment. VEECO K465i has been designed to provide a robust, repeatable, and reliable tool for producing a high volume of homogenous layers accurately and efficiently. Its advanced capabilities make it an ideal choice for customers looking for a cost-effective and versatile MOCVD asset.