Used VEECO / EMCORE K465i #9233939 for sale

VEECO / EMCORE K465i is an Ion Implantation tool designed for use in the semiconductor industry. It is a versatile, high-throughput reactor that uses ions of various elements to modify the physical and electrical properties of a substrate. The reactor utilizes a broad energy range from 0.5 to 750 KeV, with implantation rates as high as 1.25e12 at/cm2/min. This allows for the ability to precisely control the implant dose and depth into the substrate, as well as the type of elements implanted. The reactor is comprised of a vacuum chamber, ion source, shutters, and detector systems. The vacuum chamber contains a vacuum of 1x10-8 Torr, allowing for the implantation of ions into the substrate. The ion source contains elements such as Ar, Cs, Xe, and N at various energies to enable the ions to be correctly implanted. The shutters control the beam of ions to ensure accurate scanning and accurate implantation. The detector systems monitor the plot pattern to achieve precise scanning and enable accurate measurement of the area to be implanted. VEECO K465i is an analog fuzzy logic type computer controller that helps to maintain proper operation of the tool. The controller is also used to fine-tune the beam power and current profile to achieve the desired dosage. The controller also monitors the overall system and automatically adjusts ion acceleration. The tool features a multi-channel wafer mapper which allows for a variety of asynchronous implantation and sequential implantation options. It is equipped with a high-resolution ion optics system that allows for implementation of advanced scanning strategies, such as fine line scanning, 2D-overlays, and offset implantations. This system also enables uniform implantation across the entire wafer. The tool is designed for fast turn-around times and easy maintenance. Safety features like a closeable chamber lid, emergency button, and a belt conveyor lock are included for safe operation. The tool is built with maintenance in mind, with easy access to several components and easy exchange of parts. The tool also features online maintenance and documentation of implants to ensure proper functioning. EMCORE K465i is an advanced, high-throughput reactor suitable for use in semiconductor production. With its adjustable beam energies, high-resolution ion optics, and multifunctional mapper, K465i is able to precisely control the implant dose and implant depth for different applications. The tool also features easy maintenance and safety features for reliable operation.