Used VEECO / EMCORE K465i #9241368 for sale

VEECO / EMCORE K465i is an advanced inductively coupled plasma-based analytical tool for researching and analyzing the properties of semiconductor materials. This lab-grade reactor is designed for research applications and can be used to measure, analyze, and experiment with a wide variety of semiconductor materials. VEECO K465i is a high peak power, high-pressure inductively coupled plasma-based reactor that is optimized for use in electrode-level processing for deep-etch, etching, deposition, and annealing experiments. It utilizes a unique circular conductive antenna geometry to enhance the plasma coupling efficiency and power transfer into the chamber to the substrate. EMCORE K465i has an innovative dual pressure structure and two independently maintained pressure regions for excellent process repeatability and robust equipment performance. It is capable of generating high-energy density plasmas for high-density source optimization and critical-dimension habit control applications. These plasmas can be continuously monitored with a real-time Laser Ablation Interference Spectrometer for precise control of plasma chemistry and composition. Furthermore, K465i is designed for high throughput production and contains a large area, parallel-plate electrode for efficient material process distribution and uniformity. VEECO / EMCORE K465i contains an array of powerful features and capabilities to meet rigorous research demands. These features include adjustable pressure humidification and evacuation systems for precise and repeatable process control, a linear LFM (Linear Frequency Modulation) generator for advanced precision process timing, and a full suite of metrology capabilities. The reactor contains a temperature-balanced chamber to ensure consistent substrate and process temperatures for optimal performance. Finally, VEECO K465i includes a complete automation system for fast and efficient experiment setup and control. It is equipped with a computer-controlled, robotic sample handling unit that can handle both 1.27 cm diameter circular wafers and up to x cm² substrates for larger devices. In addition, a proprietary Windows-based automation machine allows easy data acquisition and control while an integrated optical tool provides detailed imaging and analysis for experiment characterization. Overall, EMCORE K465i is a powerful, advanced plasma-based analytical tool with a wide range of features and capabilities. It is the perfect tool for researchers and technicians in need of advanced and repeatable processes for semiconductor device research and analysis.