Used VEECO / EMCORE K465i #9276024 for sale

VEECO / EMCORE K465i is a low-power electron beam (e-beam) deposition reactor that is used for thin film deposition of materials in semiconductor and microelectronic device fabrication. Utilizing a closed-loop magnetron sputtering process, VEECO K465i reactor is ideal for research and development, as well as commercial deposition processes. The Kunimatsu-type electron gun of the reactor allows for ionization of Argon gas to create a plasma, as well as a low-pressure sputter deposition of desired film materials. This electron gun is equipped with automatic aperture alignment, resulting in optimal deposition parameters and smooth operation. The reactor is composed of a chamber, a substrate heating bed, an electron gun, a substrate chuck, and a set of four quadrupole magnets. The vacuum chamber of EMCORE K465i reactor is constructed of stainless steel or aluminum, and is coupled with a vacuum pump and a turbo pump to achieve a base pressure of 1 µtorr or less. Inside the reactor, there is an e-beam equipment that includes an electron gun assembly, collector, and magnetic lenses. This system is used to produce a thin, rapidly moving beam of electrons which scans the samples like a slow-moving scanner. The substrate heating bed is composed of a resistive heater with thermocouple temperature sensor. This allows a maximum substrate temperature of 400 degree Celsius, which is adjustable via a temperature control unit. K465i reactor also features a flat substrate chuck that moves up and down with respect to the electron gun, providing uniform and repeatable heating of the sample surface. The four quadrupole magnets of the reactor are used to guide electrons, forming a stable, focused beam. This helps increase uniformity and accuracy of the deposition process. By controlling the power of the magnetron sputtering, the deposition rate can be varied. The hardware of the e-beam machine includes a variety of safety features, such as over-temperature protection, total power monitoring, and voltage current stability. VEECO / EMCORE K465i electron beam reactor offers a variety of features and capabilities, making it an ideal tool for thin-film deposition processes. With optimized e-beam scanning and excellent uniformity, VEECO K465i reactor is an invaluable asset to semiconductor and microelectronic fabrication for the purposes of research, development, and commercial deposition.