Used VEECO / EMCORE K465i #9352112 for sale

VEECO / EMCORE K465i is a type of inductively coupled plasma (ICP) reactor designed for integrated technology development and production of compound semiconductor and optoelectronic materials. This cutting-edge technology utilizes a sophisticated combination of RF power and fluid power to produce high temperature plasmas and reactive gases. It features very low levels of acoustic noise and a small footprint which makes it suitable for use in research laboratories, universities, and industrial manufacturing. VEECO K465i features two RF sources and a power output range of 75-600 Watts at 13.56 MHz and 1-125 Watts at 27.12 MHz. It also features an adjustable power ramp rate which allows users to precisely control gas and ion densities. The unit utilizes a special shielding design to reduce both magnetic and magnetic electrostatic interference, making it consistent and reliable for production process applications. EMCORE K465i is designed to use up to thirteen gas, two liquid, and a single solid constituent. It features process control capabilities including pressure, temperature, and ion energy allowing it to operate within a wide range of process conditions, giving users flexibility and control. By adding a second RF source, this unit is easily modified for deposition and etching processes. K465i is a premium system with low running costs and up to three times the throughput of similar systems in its class. The fully integrated design ensures that maintenance tasks are kept to a minimum, and the unit comes with advanced thermal management control algorithms. This prevents disbursement of heat and loss of process gases due to thermal gradients. Overall, VEECO / EMCORE K465i provides an advanced on-wafer technology for optoelectronic materials processing. It features high power versatility, optimized loading and unloading times, and a very small footprint. It is a reliable high performance instrument that is well-suited for both research and production applications.