Used VEECO / EMCORE K465i #9402610 for sale

VEECO / EMCORE K465i dual-rod reactor is a state-of-the-art chemical vapor deposition (CVD) system. This system has two zones: the substrate zone and the source zone. The substrate zone contains the loadlock, which can handle two substrates simultaneously and can hold up to six substrates of up to 200mm in size. The source zone contains the carrier gas supply and introduces the reactant gases to the substrates for the decomposition of the materials to form the desired film or layer. This reactor can process materials with a wide variety of deposition parameters, from low to high deposition rate processes. It offers exceptional deposition uniformity and flexibility due to its 360-degree heating at the substrate level. The substrate is independently managed from the source by a preset or programmable position plotter. This allows for high-precision patterning. VEECO K465i utilizes both horizontal and vertical heated lines for excellent uniformity and temperature control. The system allows for advanced process controls such as gas flow, pressure, RF and bias power control, as well as advanced safety features. EMCORE K465i also features a patented quartz crystal microbalance (QCM) that can provide accurate in-situ chemical composition analysis. K465i is designed to process a wide variety of advanced materials, including high-temperature materials and oxides, such as aluminum-doped zinc oxide (AZO), amorphous silicon (a-Si) and cadmium selenide (CdSe). It is designed for applications in the development and production of thin-film transistors, solar cells, and photodetectors. VEECO / EMCORE K465i is a next-generation reactor that delivers unprecedented levels of performance, flexibility, and control in a compact, reliable package. It is reliable and easy to use, with intuitive touch panel controls and user-friendly software for simple setup and operation. It also includes a comprehensive suite of laboratory tools for improved process monitoring and customized tool control.