Used VEECO / EMCORE TurboDisc K465i GaN #9375085 for sale

VEECO / EMCORE TurboDisc K465i GaN Reactor is a state-of-the-art, high performance production reactor capable of producing metal nitride films. Built on VEECO patented TurboDisc technology, the K465i is a single-wafer, vertical-reaction chamber deposition system designed to produce films with uniformity and precision not achievable with other deposition methods. With its perpendicular upper and lower shafts, the K465i can process multiple wafers simultaneously, while its advanced deposition controls and chamber design provide improved performance in production environments. The TurboDisc K465i uses a two-stage high-density electron cyclotron resonance (ECR) plasma source along with a novel RF bias system for increased deposition rate. The high-density ECR ensures a higher level of ionization and efficient radical production, enabling better surface coverage. The RF bias system further increases the ionization levels of the energetic species present in the plasma. These combined features are what give the K465i its remarkable deposition rate of up to 250 Å/min. The K465i is ideal for the deposition of GaN, gallium oxide (Ga2O3), and nitrogen-doped gallium oxide (GaN:O) films. It has a base chamber pressure of 2×10-9 Torr, and advanced process steps can achieve lower pressures to around 1×10-8 Torr. The loadlock chamber can handle up to 6″ wafers and can provide up to 350mm substrate handling. The reactor also offers a comprehensive range of control options, such as four quartz lamps for substrate illumination, shifter plates for geometric effect compensation, and gas inlets for reactive species control. This ensures real-time process monitoring and accurate deposition cycles. Additionally, its user-friendly touchscreen interface allows straightforward reaction engineering. The TurboDisc K465i is a technologically advanced and dependable choice for the production of high quality metal nitride films. With its unique features and innovative design, it is the ideal choice for applications such as LEDs, sensors, memory, and power semiconductors.