Used WATKINS-JOHNSON 1000H #199252 for sale
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ID: 199252
Reactor / Hydride system, 8"
3.0 system with exhaust modified to 2.0 inch for better uniformity
Silane (SiH4) based SiO2
Tool was devoted to SiO2 only; Never ran dopants
Voltage: 208, 50/60hz, 3 phase
(2) Sets of parallel plate injectors
Planned processes:
Film type: NSG, Chamber 1: 380°C deposition temp., 250A thickness, 8", 11ipm belt speed
Film type: NSG, Chamber 4: 380°C deposition temp., 2000A thickness, 8", 11ipm belt speed
Film type: NSG, Chamber 4: 380°C deposition temp., 1000A thickness, 8", 11ipm belt speed
Gas box:
(4) D1N2, 10slm, Lintech MC-200B, 100% concentration
(4) O2, 1.5slm, Lintech MC-2100O, 100% concentration
(4) Sep N2, 20slm, Lintech MC-200B, 100% concentration
(4) B2H6
(4) PH3
(4) SiH4, 0.2slm, Lintech MC-2100MO, 20% concentration, N2 balance gas
(4) D2N2, 6slm, Lintech MC-200B, 100% concentration
Cable lengths:
UPS Communication Cable (Note 1) 40ft, Part No: 815003-378
Communication Cable (Note 2) 20ft, Part No: 815001-732
Reactor Facility Cable 40ft, Part No: 907233-004
UPS Power Cable 10 40ft, Part No: 985227-004
UPS Extension Cable 30ft, Part No: 907202-003
Exhaust modifications done at time of original build:
3.0 to 2.0 Exhaust Downgrade Kit:
A) (8) Adaptor Assy, 3.0 to 2.0 Orifice
B) Toroidal 3.0 to 2.0 orifice installation kit (replaces 912010-001)
C) Process output plumbing kit (replaces 912106-001)
D) Hoist Adaptor Kit
E) 2.0 Muffle Etch Hardware:
3 color signal tower: Green-Yellow-Red
SECS II SW option
English software
Modifications by OEM:
1 - The 3" exhaust was modified at the torrodial orifices to 2" that can provide better on wafer uniformity for the SiO2 film
The torrodials, bellows, and injector vents also have 2" exhaust type
Downstream of the torrodials to the house exhaust the system is the standard 3" type
2 - Gas box has SiH4, N2, and O2 MFC's, but never had dopant (B2H6 and PH3) MFC's installed for BPSG films
This tool has never run dopants
There are SS tube spools in place where the dopant MFC's would normally be placed
If the buyer wants to run doped films that is no problem, they just need to add the MFC's into the tool
The original owner only used the tools for various SiO2 films and wanted to keep them (and the system) as pure and dopant free as possible
UPS may not be included/or non-functional due to age
Tool is de-installed, barrier bagged, and crated
Currently stored in a warehouse
1996 vintage.
WATKINS-JOHNSON 1000H is an advanced, research-grade reactor designed for running in-depth nuclear physics experiments. It is a Compact High Neutron Flux Reactor (CNR), typically used in research laboratories to simulate nuclear reactions and measure radiation levels. The reactor is an ideal tool for laboratories, universities, and power plants as it is capable of producing very high neutron fluxes. It boasts an integrated safety system, along with a range of patented technologies that allow for reliable and safe performance. 1000H is composed of a central reactor core, surround shielding, graphite reflector and moderator, and a plenum chamber. The reactor core is filled with uranium which has been highly enriched to create a nuclear reaction. The graphite reflector and moderator controls the neutron flux and limits the range of reactions. The plenum chamber allows for the influx and outflow of cooling fluids; the reactor is capable of running for extended periods without the need for scheduled maintenance. WATKINS-JOHNSON 1000H reactor's integrated safety system is designed to monitor the reactor's performance and any abnormalities. It features numerous sensors and detectors which record and records data regarding the neutron flux, criticality, and radiation levels. Additionally, the reactor is equipped with an emergency shut down system, designed to immediately shut down the reactor should any unsafe conditions arise. 1000H reactor has a maximum power output of 1,000 watts. It is small in size and easily accessible, providing reliable performance and data in a highly regulated environment. The reactor is a popular tool among nuclear physicists, providing a range of useful functions including neutron-flux determination, cross-section measurements, and radiochemical analyses. WATKINS-JOHNSON 1000H reactor is a robust, advanced and reliable research tool.
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