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ID: 9172399
Scanning Electron Microscope (SEM)
Without EDS
Tungsten filament single beam
EDWARDS 8 Vacuum pump
Vacuum system:
High vacuum mode: <6 x 10^-4 Pa
Low vacuum mode: 10 - 270 Pa
Through the lens ESEM differential pumping technology
70 l/S Turbo molecular drag pump
Rotary pump
Electron optics:
Pre-aligned
(3) Lenses
Air cooled
Electron optical column optimized for high resolution
Fixed position
Final lens aperture
Navigation:
X: 50 mm (Motorized)
Y: 50 mm (Motorized)
Z: 25 mm (Manual)
Tilt: +75° to -15°
Tilt eucentric at analytical working distance: 10 mm
Source: Tungsten hairpin filament
Voltage: 200 V to 30 kV
Beam current: > 2 µA
Resolution: 3.0 nm Gold particle separation on carbon substrate
High vacuum operating modes: 10 nm at 3 kV
Low vacuum operating modes: <12 nm at 3 kV
Focus range: 3 mm - 99 mm
Magnification: 6x to >1,000,000x
With 19" LCD monitor
Scanner:
Pixel density: 512 x 442, 1024 x 884, 2048 x 1768
Dwell time: 50 ns/pixel to 1 ms/pixel
Electronic scan: n x 360°
Detector
Monitor: LCD, 19"
Low-kV, Solid state backscattered electron detector with preamplifier
CCR IR Camera.
FEI Quanta Inspect is a high-performance scanning electron microscope (SEM) designed for advanced research and analytical lab experiments. It is ideally suited for the inspection and analysis of a variety of materials including semiconductors, composites, metals, ceramics, polymers, magnetic materials and thin films. Quanta Inspect SEM utilizes a state-of-the-art electron column, which gives the instrument superior performance and resolution. It includes the latest in imaging and digital signal processing capabilities. It features an advanced Liebscher Type Gun (LTG) electron source with probes for both high-resolution imaging and backscattered electron imaging. In addition, it has an intelligent imaging and analysis platform, which features an intuitive graphical user interface, automated levels and measurement distances, image stitching capabilities, as well as a wide range of tools to measure critical structures. FEI Quanta Inspect is capable of providing high quality images with a lateral resolution of 1.4 nm and dynamic range of 14 bits. It also features a variable pressure scanning electron microscope (VP-SEM) which ensures superior imaging in a range of working conditions. The VP-SEM changes the speed of the high voltage accelerator to maintain the optimum vacuum conditions for imaging and analysis. On the sample stage, Quanta Inspect offers a number of options for applications including a motorized positioning system, a tilt stage for viewing dynamic objects, an auto-focus system, sample navigation amenities, and a programmable scan speed range. FEI Quanta Inspect employs a variety of detectors to give users the flexibility to tackle the most challenging analytical demands. Its multicloud detector can be used for low- and high-energy beam imaging. The electron backscatter diffraction (EBSD) detector gives researchers the clarity they need to study nanoscale features on a variety of materials. It can also detect and analyze elemental composition in both thin and bulk specimens. Quanta Inspect is an all-in-one SEM solution that provides advanced features, such as automated mapping, array measurements, automated data acquisition, and reporting. It's an ideal tool for a wide range of research and industrial applications.
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