Used HITACHI HS-9050 #293750873 for sale
URL successfully copied!
Tap to zoom
ID: 293750873
System
(3) Load ports
(3) Ash/Strip process chambers
Chambers: PM1, PM2, (8) Sticks gas panels
Chamber: PM3, (10) Sticks gas panels
SINFONIA Robots and loaders
SHIMADZU Turbos
EDWARDS Dry pump
Dual zone temperature ESC
Buffer and transfer module
Dual wafer substations
Cooling unit
Process kit included.
There are no reviews yet