Used HITACHI RS-4000 #293608920 for sale
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ID: 293608920
Wafer Size: 8"
Defect Review Scanning Electron Microscope (DRSEM), 8".
HITACHI RS-4000 is a scanning electron microscope (SEM) capable of providing high resolution, large depth of field imaging combined with a comprehensive range of sample analysis capabilities. The instrument is capable of achieving resolution of 3.5 nm and a depth of field of up to 100 μm. HITACHI RS 4000 is equipped with an EDX detector for elemental analysis, and is also capable of imaging specimens in backscattered electron (BSE) mode. The equipment also comes with an automated stage and a software control system for easy and accurate image acquisition. RS-4000 utilizes an in-lens type of secondary electron (SE) detector, which improves detection efficiency and allows for bright contrast imaging. This detector is capable of collecting up to 1M electrons/01 of a second. RS 4000 is equipped with an automated stage which offers 5-axis movement and a maximum sample size of 160 mm square. The stage is also accompanied by an automation software package which allows for precise control of the stage in real-time. HITACHI RS-4000 also includes a range of specialized imaging techniques, including low-kV variable pressure imaging, energy dispersive spectroscopy (EDS) and x-ray mapping. The low-kV variable pressure imaging can be used to provide an efficient 3D map of a sample without the need for conventional slicing and mounting methods. The EDS unit enables high-resolution mapping of elements with atomic numbers from 4 to 92. The x-ray mapping machine allows for quick investigations of samples at room temperature with no need for high-vacuum conditions. HITACHI RS 4000 comes with a range of accessories including a gas injection tool, which allows for the injection of gases into the specimen chamber for controlling the humidity and pressure of the sample. The asset also includes a cooling model, which provides thermal-protection during high-resolution imaging. Additionally, RS-4000 can be used with a range of various secondary electron detectors and cold cathode detectors. To ensure ease of use, RS 4000 includes a comprehensive software package. This package provides automated imaging and analysis functions, a CAD drawing tool, and a simple user interface. Finally, the equipment is designed for long-term reliability, offering routine maintenance and calibration services to ensure its operation over the longer term.
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