Used HITACHI RS-4000 #9036353 for sale

Name: HITACHI RS-4000
Brand: HITACHI
SKU: 9036353
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Scanning Electron Microscopes

Manufacturer

HITACHI

Model

RS-4000

ID: 9036353

Scanning electron microscope (SEM), 8"-12" Includes: Process evaluation: Litho, etch, CMP Beam tilt: 10° Laser darkfield microscope, EDX 15 kV SEM: Ip = <10pA ... 200pA Darkfield OM: Laser scatterlight (B/W) Field of view (ca.): 620 um (220x) Illumination level: Manually adjustable For particles >1 um strong interference patterns appear CCD Bad pixel calibration possible: No Brightfield OM: Field of view (ca.): 620 um (220x) B/W only Cassette interface: (2) 12" Load-ports 8" Load ports: No Robot handler (single end effector) Status lamp (R/Y/G/B) GEM/SECs Sub-Fab (supporting) equipment: Equipment rack (power box) (2) BOC EDWARDS EPX-180LE Dry pumps (1) Cryo tiger cryo compressor EDX (Option), 15 kV: Automatic defect re-detection Automatic defect classification Vacc: 500 V - 5 kV (auto.), resp. 15 kV (man.) SEM Pixels: 512 or 1024 SEM Magnification minimum: 1000x (140 µm FOV) SEM Magnification maximum: 200000x (0,7 µm FOV) Detector SEM: Left topography (BSE) Right topography (BSE) SE VC Image display SEM: Live and average mode OM: DF + BF OM Magnification: 220x (ca. 620µm) 440x (by digital zoom) Tilt: 10° (beam tilt) Stage rotation: No Stage accuracy: +/- 1µm Image resolution SEM: 3.0 nm (800 eV) Auto EDX: Yes Defect sensitivity MTBF: 1000 Hrs Downtime per month: 6 Hrs Particle contamination Front side: Maximum 7 adders >0.16µm Back side: Maximum: 3500 adders > 0.2µm Maximum: 100 adders > 5.0 µm (incl. clusters) Throughput: 10 Wafer / h (50 Defects) 900 Defects+ADC/h (1wafer) Manual loading without defect file: Yes FIB Vacc: No FIB Milling accuracy Milling frame size Measurement requirements: AST in current software: No Lowest SEM magnification: 1000x Maximum voltage for automatic ADR and EDS 5kV 15kV for manual EDS Minimum voltage 500V Image mixing: Ok Manual loading without defect file: Ok NORAN System: (6) EDS will be offered Stage resolution: Ok Beam tilt: 10° Image resolution at 800eV: 3.0nm 230 VAC (6kVA), Single phase, 50 Hz CE Marked Currently stored in clean room 2005 vintage.

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HITACHI RS-4000 is a scanning electron microscope (SEM) that uses a focused electron beam to create images for visualizing and analyzing a variety of materials. It employs advanced energy filtering technology for an optimal contrast of specimen's topographic and chemical composition. In addition, it uses Scanning Beam Energy Dispersive X-ray (SBEDX) to measure the elemental composition of the sample. The microscope features a multi-spectral imaging mode which has the ability to acquire four different images at the same time in different wavelengths, enabling the full visualisation of physical, chemical, and structural properties of a sample. HITACHI RS 4000 offers ultra-high resolution imaging with its wide range of objective lens magnifications - up to 500x. The integrated auto-stigmation functions allow for easy adjustment of the electron beam while eliminating the need for manual adjustments. It also has a built-in remote control equipment, allowing for remote monitoring and operation of the system. In addition to high resolution imaging, RS-4000 offers a wide range of analytical capabilities. It can be used to measure surface topography, layer thicknesses, and 3D sample parameters over large areas. It also has the ability to characterize specimen coatings, such as films, glasses and metals, using X-ray fluorescence, energy-dispersive X-ray spectroscopy (EDS), and electron backscatter diffraction (EBSD). RS 4000 is versatile enough to be used in a range of applications, including material characterization, metallurgical research, microelectronics, medical research, and forensic investigation. It has several advanced features, including detectors for high-resolution secondary electron (SE) imaging, quasi-backscatter (QB) imaging, and an ultra-high-resolution, large-field-of-view backscattered electron (BE) detector, which enable the acquisition of both topographic and chemical information in a single scan. HITACHI RS-4000 is designed for ease of use, and its open architecture allows for quick integration into automated processes. The unit is user-friendly, with intuitive software for setting up experiments, controlling the running of scans, and reviewing data. Additionally, the machine offers a wide variety of support services, from maintenance and training to software development. The user-friendly design and advanced features make HITACHI RS 4000 an ideal choice for laboratories and research centers that require SEM capabilities with reliability and flexibility.