Used HITACHI S-7800H #9120137 for sale
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ID: 9120137
CD SEM inspection system, 8"
Manual wafer loading
Resolution: 5nm at 1kv
Reproducible Precision of Measurement: Static 3 Sigma 0.010um
Reproducible Precision of Positioning: X & Y Stage within +/- 15um
Precision of the Stage Rotation: X & Y within +/- 60um
Pre-alignment of Stage: X & Y +/- 15um
Throughput: 5 Wafers/Hour
Oxford INCAx-Sight EDX
Stage Movable Range:
X: 0 ~ 200mm
Y: 0 ~ 200mm
Z: 4 ~ 12mm
R: 0 ~ 360° T: 0 ~ 60°
Vacuum Pumps
Chiller
Transformer
Operations Manual and Documentation.
HITACHI S-7800H is a high resolution, scanning electron microscope (SEM), capable of executing a wide variety of imaging techniques. It boasts a large specimen chamber, enabling observation and analysis of larger samples. Its electronic system comes with an integrated image processing unit for the automatic manipulation of data that can be outputted as a digital signal. HITACHI S-7800 H has a wide range of applications, from imaging to elemental analysis when used in tandem with an energy dispersive X-ray spectroscopy (EDS) stage. The microscope has three electron gun systems: a cold field emission gun (CFEG), field emission gun (FEG), and a thermionic field emission gun (TFEG). The CFEG has a high brightness and low accelerating voltage resulting in a high resolution image. The FEG has a lower resolving power. The thermionic emission gun offers a high resolution imaging at high accelerating voltage, with a range of 0.7-30kV. S-7800H is a variable pressure SEM, capable of operating between 1 and 600 Pa. This allows the observation and analysis of a variety of specimen types such as organic materials, ceramics, and conductive materials, enabling a variety of imaging techniques. The microscope supports simultaneous illumination with primaries (SE (secondary electrons), BE (backscattered electrons) and CL (cathodoluminescence)) and one secondary (BSE (backscattered electrons)), allowing for multi-layer analysis and imaging. The tool also provides a broad range of automated operations including sequential imaging, contrast enhancement, and digital merging. S-7800 H has a motorised stage which supports X, Y, Z movements, adjustable focus and tilt, allowing automated sequential imaging. The stage has a large accurate sample area, capable of movement in the X and Y axes of up to 75mm each. In terms of system features, HITACHI S-7800H has a user friendly touchscreen LCD interface, allowing users to input text variables, as well as providing visual readout. The microscope also comes with a data processing unit, allowing users to manipulate the image data directly, as well as output the data as a digital signal. Overall, HITACHI S-7800 H is an incredibly versatile SEM, capable of a wide range of imaging techniques and automated operations. It has a high resolution imaging, as well as capable of varying pressures and automated imaging. Furthermore, the user friendly interface makes it particularly easy to use and navigate. All of these features combined give S-7800H an edge over competing products.
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