Used HITACHI S-8820 #9172598 for sale
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ID: 9172598
CD Scanning electron microscope (SEM), 8"
Mainframe
Open cassette
Electron gun: Schottky emission source
CD Measuring size: 200-250 nm, consistently
Accelerating voltage: 700 V-1300 V, 10 V Steps
Probe current:
1-16 pA With automated setting and measured by faraday cup
1-8 pA at 800V or 1-16 pA (With optional retarding voltage)
1-10 pA at 1000 V
1-13 pA at 1300 V
(3) Stage electromagnetic lens system
Objective lens: (4) Opening click stop
Heated aperture
Adjustable outside the vacuum system
(2) Stage deflection scan coils
Astigmatism correction via an 8-pole electromagnetic coil
Magnification: 1000x - 150000x
Field control method: Continuously on for sample decharging at all volts
Wafer imaging ability: 8” Entire surface
Depth of focus: Magnification ≥ 1.0 mm at 80000x
Resolution:
< 8 nm at 700 V-1000 V or < 6 nm (With optional retarding voltage)
< 6 nm at 1000 V-1300 V
HITACHI Probe tip
Optical microscope system:
Monochrome image
CCD Camera
Magnification: 110x
Wafer imaging X and Y coverage from 5 – 195 mm
Notch down
Workstation HP 715 / 64
User interface software version: 9.25A
Error tracking software
SECS Communication and GEM interface
Multipoint measurement function
Edge roughness function
Contact hole measurement function
Automated image archiving function
Cassette flipper:
(2) Flippers per load port
(3) Ion pumps
AV-1
Movable aperture plate assembly
Stage and evac panels
Stage: X & Y Step motors and drive are intact
Vacuum systems:
TMP1
TMP2
Valves are intact
Wafer loading robot type: MECS OF250
Robot controller: MECS UTC 100A
With NAKAV2 (OFV1.7)
Pre-aligner type: MECS UTC820Z
Pre-aligner controller type:
MECS OF250
With OF2BCV1.7 (UTCV2.3)
MITUTOYO PSU Model PSU11-2
Loadlock turbopump controller: LEYBOLD NT10
Chamber turobpump type: LEYBOLD Turbovac 340
Chamber turbopump controller type: LEYBOLD NT340M
Microscope illuminator type: HOYA-SCHOTT Cold-light HL50E-HI / 50w 12V 5A
HITACHI SE Cathode
SONY CCD Video camera module
MATSUSADA Precision laser PSU type HVL-10P-HS
Missing parts:
Stage ROM PCB (Wafer transfer unit stage controller)
Ion pumps batteries unit: Internal parts
Operator interface parts included:
Software disks:
PANASONIC Magneto-optical disk
128 MB
S-8640/8840 CD Measurement SEM system
CD Measurement SEM user data
Backup SW version 15-10
Number of hours on gun PSU: 51191.7
Workstation type:
HEWLETT-PACKARD PA-RISC Powered 715/64
VME Rack boards:
EBS 100 Stage controller PCB
EPS 100 WT Controller PCB
EPS 100 EVAC Controller PCB
EPS 100 HV Controller PCB
ECPU 261 PCB
COGNEX Vision system:
4400 PCB
IMEM PCB
SIP PCB
PSDISP PCB
SG / VA PCB
EOCONT PCB
OMAFC PCB
Power supply boards:
NAGANO japan radio Co. NUPS-500 HRM NJD-4018
NAGANO japan radio Co. NUPS-500H HRM NJD-275
Ion pump power supply interface PCB
Auto transformer unit
Currently de-installed and warehoused
1996 vintage.
HITACHI S-8820 is a scanning electron microscope (SEM) with a wide variety of features that allow for both observation of samples at high magnification, as well as automated quantitation of sample detection. This microscope is well-suited to the imaging of various biological and chemical samples, ranging from biological cells to mineral samples. HITACHI S 8820 includes a large chamber that provides ample workspace, allowing for the easy placement of samples on an automated sample stage. This stage provides the ability to move the sample during observation, enabling dynamic observation of sample characteristics. For imaging, S-8820 makes use of a cold cathode field emission source. This source emits a focused beam of high energy electrons, which allows for high resolution, detailed imaging of samples. For automated image analysis, S 8820 is equipped with scanning, magnification and image quantification capabilities. HITACHI S-8820 has variable scan speed, particle size, and background detection settings for each sample, allowing for a tailored analysis of samples. HITACHI S 8820 also includes both automated and manual specimen orientation settings, allowing for complete control over the sample imaging process. In addition to imaging samples, S-8820 is outfitted with a wide range of measurement capabilities. The microscope is equipped with both a linear and a rotary stage for multi-axis sample motion, allowing for measurements of particles and features in three-dimensions. S 8820 also features a wide range of detector options, providing the ability to measure various parameters, including thickness, distribution and energy spectra. HITACHI S-8820 is a powerful scanning electron microscope that provides a wide range of capabilities, both in imaging samples and performing measurements and quantitation. The tight beam focused by its cold cathode source allows for resolution of minute structures, while the automated sample stage and range of measurement functions allow for complete analysis of samples - making HITACHI S 8820 well-suited to the imaging of a range of sample types.
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