Used HITACHI S-8820 #9189515 for sale
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ID: 9189515
Critical Dimension Scanning Electron Microscope (CD-SEM), 8"
V Notch and flat edge type
Cassette: (2) Ports
Robot & pri-aligner: MECS UTC-100, OF-250
Gun tip type: Denka 174DH (Exchanged new)
Image resolution: 5 nm (800V)
Accelerating voltage: 500V to 1300V (10V Step)
Electron optic system: Retarding methode
Measure repeatablity:
(3) Sigma: 1% / 5 nano
CD Measurement range: 0.1~10 micro
Throughput: 25" Wafer/Hour, (5) points
Magnification:
OM Mode: 100x
SEM Mode: 300x ~ 200, 000x
EWS:
HP B132 / HP B180 With LCD type monitor
Vacuum system:
(3) Ion pumps
(2) Turbo pumps
Stage system: X-Y 200mm Plus motor driving
Dimensions:
Main body: 1,170W x 1,890D x 1,650H mm
Controller: 600W x 1331D x 1800H mm
Power unit: 535W x 600D x 1500H mm
Options:
(2) Rotary pumps
(2) Dry pumps
Does not include Dry pump
1997 vintage.
HITACHI S-8820 is an advanced scanning electron microscope (SEM) ideal for analyzing surface topography and defects. This instrument can be used for a variety of applications such as semiconductor evaluation, failure analysis, and life science research. HITACHI S 8820 offers a wide range of features that provide researchers with high-resolution, high-sensitivity, and excellent image stability. It utilizes a field emission source, which enables it to generate images with superior resolution. The various condenser lenses provide an enhanced signal-to-noise ratio and allow for greater image resolution. The expanded detectable signal range of this microscope also gives it a huge dynamic range and allows for observation of faint signals, as well as delivering a brighter overall signal. It also boasts an advanced algorithm for electron beam control and excellent positioning accuracy, giving imaging performance that is stable and repeatable. It features a high-speed accelerating voltage range, allowing for the observation of dynamic phenomena such as oxidation on samples. With its large specimen chamber, S-8820 can accommodate large sample diameters, allowing for more exhaustive analysis. S 8820 also delivers excellent data analysis capabilities. It features a wide range of functions that can be controlled through the digital signal processing, such as subtraction and addition of images. In addition, the computer-controlled stage and beam scanning allow for easy measurement of the depth profile, which is further assisted with the inclusion of a motorized focus system. The auto-focusing feature can be set and adjusted to match the sample surface and optimize the image and measurement results. Overall, HITACHI S-8820 is an excellent scanning electron microscope which can provide researches with clear and detailed insights into their samples. Its field emission source, motorized focus system, and powerful data analysis capabilities give it the capability to deliver accurate and high-resolution imaging performance.
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