Used HITACHI S-8840 #9214004 for sale
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ID: 9214004
Wafer Size: 6"-8"
Vintage: 1997
Critical Dimension Scanning Electron Microscope (CD-SEM), 6"-8"
Workstation:
Model: B180L
Operating system: HP Unix
SEMI / JEIDA: Flat / V Notch wafers
Measurement method: Curser / Line profile
Measurement range: 0.1 ~ 11 µ m
Measurement repeatability: ±1% / 2 nm (3s)
Throughput: 26 Wafers / Hour
Secondary electron image resolution: 5 nm
Image magnification: 1,000x ~ 150,000x
Measurement points:
1 Point / Chip
(5) Chips / Wafer
Electron optics system:
Electron gun: Schottky emission type
Accelerating voltage: 500 to 1300 V
Lens system: Electromagnetic condenser lens system and FCM objective lens
Secondary electron detection method: 2-Stage electromagnetic deflection
Objective lens aperture: Heating type movable aperture with fine adjustment
Scanning method: 2-Stage electromagnetic method
Astigmatism correction method: 8 Polar electromagnetic method (X and Y axis)
Monitor: Faraday cup incorporated with automatic measurement function
Optical microscope: 1.2 mm² Visual field, monochrome image
Stage:
Movement range:
X and Y: 0 ~ 200 mm
Driving method: Pulse motor
Computer controlled operation
Speed: Maximum 51 mm/s
Wafer transfer robot method:
(2) Cassettes random access method
Wafer detection inside cassette: Arm type robot
Vacuum chucking method
Orientation flat / V Notch detection: Non-contact automatic detection method
Control and display system:
Observation control CRT:
EWS (GUI) LCD Monitor
Integral processing image display
Interactive computer operation
Wafer map display
Measured value indication
Stage coordinate indication
Scan mode:
TV Scan
Raster rotation
Auto brightness / Contrast control
Image processing:
Photographic recording unit
Effective visual field 80 x 80 mm
Safety device: Mushroom type EMO switch
Measurement data processing system:
File storing function:
3.5" Floppy disk drive
3.5" Magneto optic disk drive
With storage
Recording media:
Hard disk with EWS
3.5" Magnetic optical disk
3.5" Floppy disk
Print output: 80 Digit thermal printer
Evacuation system:
Method: Automatic dry cleaning evacuation system
Vacuum pumps:
(3) Ion pumps
(2) Turbo molecular pumps
(2) Oil rotary pumps
Safety devices:
Power fail / Vacuum level safety devices
1997 vintage.
HITACHI S-8840 is a scanning electron microscope (SEM) that is designed for sophisticated, high-resolution applications. HITACHI S8840 allows for the study of the nanostructure of materials and devices in the micron to submicron range. The high-power, low-voltage electron beams are capable of producing detailed images of conductors, insulators and semiconductors with a resolution of 40nm and a magnification range of 20x to 500,000x. S 8840 is equipped with advanced technology that allows for high-quality imaging and analysis. The microscope utilizes low-enthalpy, non-destructive electron beams and advanced signal processing systems, which greatly reduce image distortion. The powerful signal processor delivers clear signal-to-noise ratios while providing accurate signal output and detailed 3D images. S8840 also offers a choice of probe detectors including a CCD camera for obtaining high quality video images and an ultra-high sensitive field emission detector. The low current detector provides a dynamic range of up to and over 1 million electrons per second, enabling the user to detect subtle changes in the electron beam conditions. The microscope is also equipped with a vacuum chamber which is capable of maintaining a vacuum of 10⁻⁶bar, suitable for both materials-science and semiconductor applications. HITACHI S 8840 features a user-friendly graphical user interface and a full set of software tools, as well as a range of options and accessories, making it suitable for a variety of demanding applications. The microscope supports energy-dispersive X-Ray spectroscopy (EDS) and energy-filtered imaging (EFI) for elemental analysis and the study of the elemental composition of materials. The SEM can also be used to observe crystal structures and texture of materials, allowing for better characterization of microdevice structure and properties. In addition, S-8840 offers a laser beam induced luminescence (LBIC) system which allows for visual inspection, contrast enhancement and automatic analysis of samples. The SEM is also equipped with a high-precision plasma etching system for sample preparation, a gas inlet for heating the sample, and a support arm to aid in sample manipulation and positioning. HITACHI S-8840 is an advanced scanning electron microscope capable of providing high-resolution images and valuable data analysis. It is a reliable and high-performance instrument suitable for a wide range of research purposes.
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