Used HITACHI S-9200SA #165834 for sale

Name: HITACHI S-9200SA
Brand: HITACHI
SKU: 165834
Availability: InStock

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Scanning Electron Microscopes

Manufacturer

HITACHI

Model

S-9200SA

ID: 165834

Wafer Size: 6"-8"

Vintage: 2000

CD SEM system, 8" Workstation: Model : B2600 O/S :HPUX Software Version : 18.35ev15 IP Read : 5.4~16.1pA(Low mode) CD measurement principle: Cursor and line profile measurement CD measurement range: 0.1 to 2.0 um Secondary electron image resolution: 3nm Image magnification: SEM image; 500 x 300,000 Optical microscope image; about x110 Specimen stage: Movement range X and Y: 0-200mm Stage drive: Pulse motor Control and speed: max. speed 100mm/s Wafer loader: Wafer transfer from cassette to loader chamber: Auto transfer via wafer transfer robot Wafer transfer from loader chamber to stage: Auto evacuation and auto loading Wafer transfer robot system: random access using (2) cassettes Wafer detection in cassette: Auto detection via wafer searcher Chucking method: Vacuum chucking on back of wafer Orientation flat/ V notch detection: non-contact auto detection via optical sensor Electron Optics: Schottky emission type Accelerating voltage: 500 to 1600V Lens system: Electromagnetic condenser lens system, booster objective lens Secondary electron detection: Scintillator/ photomultiplier detection system Objective lens aperture: Heating type movable aperture Scanning coil: 2-stage electromagnetic type (X, Y axes) Probe current monitoring: Faraday cup incorporated, with automatic measurement function Optical microscope: 1.2 mm square visual field, monochrome image Control and display system: Viewing control CRT: 21 type monitor Scanning modes: TV scan, HR scan, SLOW scan Image processing: Software processing using filtering Saftey device: Equipped with emergency off switch CD measurement data processing system: File storage Storage media: Hard disk (2GB), 3.5 type magneto-optic disk, 3.5 floppy disk Data processing function: statistics scanning using worksheet system Printout: 80-character thermal printer Evacuation system: Evacuation principle: Full automatic dry & clean evacuation Vacuum pumps: (3) Ion pump, (2) turbo molecular pump, (2) oil rotary pump Safety devices N2 Gas source (for leak): Gas pressure: 200 to 660 kPa Outside Diameter of connecting tube: 6um Compressed air source (for valve drive) Air pressure: 600 to 880 kPa Outside diameter of connecting tube: 6mm Vacuum source (for auto loader) Vacuum pressure: P= 1.3 to 21.3 kPa Outside diameter of connecting tube: 6mm. VIPS and Cognex are missing Currently warehoused 2000 vintage.

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HITACHI S-9200SA scanning electron microscope is a high performance tool for advanced scientific and industrial requirements. It offers superior imaging resolution, flexibility, and usability with its advanced scanning and detection technologies. Its large chamber and high-resolution anti-vibration system provide a highly stable environment and superior image clarity, while its wide range of automated operations ensure efficient and user-friendly operation. S-9200SA features a high-speed ultra-high resolution PCO (proper combined optics) and scanning probe systems, which can be easily changed and offer a long working distance up to 160 mm in order to accommodate diverse sample sizes and shapes. This feature is ideal for non-standard samples. The PCO, together with the multi-tilt and rotational sample preparation, allows optimal image clarity. The scanning system provides outstanding imaging resolution and contrast with the integration of an ultra-high vacuum (UHV) column and a sample rotation stage. It also has an automatic sample stage movement and a six-axis sample manipulator for detailed analysis. The high linear accuracy of the sample stage is also advantageous for accurately measuring middle-size and small sample parts. The microscope is also equipped with a full range of detectors and signal processors, from secondary electron and backscattered electron detectors to EDX elemental analysis (EDX), X-ray microanalysis (XRM), and cathodoluminescence. It also features advanced digital imaging with the ability to perform 3D depth analysis, automated pixel correlation techniques and various integrated functions such as line scan mode and Z-slicing. This ensures reliable data acquisition and analysis as well as easy access to results. HITACHI S-9200SA offers superior image quality, with low-noise background, and a high signal-to-noise ratio. This allows the microscope to be used in demanding life science and industrial applications, such as nanosurfacing, semiconductor industry, electronics, material sciences, and nanotechnology. Overall, S-9200SA is a high-end scanning electron microscope that combines superior imaging resolution with versatile options for sophisticated samples, allowing for complex analysis and research. Its range of automated operations, sophisticated detectors and processors, as well as its 3D depth analysis capabilities make it an ideal tool for both industrial and academic research projects.