Used HITACHI S-9300 #9169651 for sale
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ID: 9169651
Wafer Size: 8"
CD Scanning electron microscope (CDSEM), 8"
Electron optical system:
Electron gun: Schottky emission source
Accelerating voltage: 500 V to 1600 V, 10V Steps
Probe current: 4~24pA
With automated setting and measurement by Faraday cup
Electromagnetic lens: (3) Stages
System with boosting voltage
Objective lens:
(4) Opening click stops
Heated aperture
Scan coil: (2) Stages electromagnetic deflection
Astigmatism correction via an 8-pole electromagnetic coil
Magnification: 1000x to >300000x
Field control method: Sample de-charging
Wafer imaging ability: Entire surface of 8” (or 12”) wafer
Depth of focus: >= 1.0um at 80000x magnification
Resolution: 3 nm (800V) Retarding / Boosting mode
HITACHI Probe tip
Optical microscope system:
Monochrome image, using CCD camera
Magnification: 110x
Wafer imaging:
X Coverage: 5-295 mm
Y Coverage: 5-195 mm
Notch down
Field of view: 1.2 mm
Workstation:
Model: HP B180L (9GB)
O/S: Unix version HP-UX 10.20
Software version: 14.71
SECS/GEM Communication interface
Dual XY HITACHI microscale
DSP Image processing
BSE Mode functionality
Multipoint measurement function
Edge roughness function
Automated image archiving function
Others:
(2) 200 mm Wafer handling systems
Cassette holders / Ergo flippers
Convertible to 300mm with conversion kit BRK-287006300
Currently crated and warehouse.
HITACHI S-9300 is a scanning electron microscope (SEM) used to observe and analyze the structures of a variety of samples. This particular SEM is a variable pressure (VP) equipment, allowing the user to control the pressure of the electron beam, allowing for observation and analysis of minute particles and structures. HITACHI S9300 utilizes a 5-channel video port for speedy image capturing, allowing for real-time on-screen magnification of up to 500,000X. This device also features advanced image processing software allowing for a variety of image enhancements, such as labeling, adjusting contrast, gamma correction and unlimited binning capabilities. S 9300 utilizes a field emission electron gun as its source, allowing for a clean beam of electrons to be sent to the sample. This gun is made of high-grade tungsten material and can provide a resolution of approximately 16 nanometers, in both standard and high-resolution settings. The high-precision spot size of S-9300 is maintained by its 15-axis motion control system. This motion control unit enables sharp and precise movements, so that edge-to-edge imaging can be achieved. Additionally, this machine also prevents any mechanical defocusing of the electron beam, so images of miniscule particles can be rendered without distortion. S9300 features a patented optical tool that provides powerful illumination and imaging capabilities. This optics asset consists of a 5-lens objective column and a 5-lens projector column, both of which are fabricated from low-friction, precision-grade glass to ensure the highest definition of images and samples. Also featured in HITACHI S 9300 is an advanced control surface. This 8.4-inch LCD color display gives the user quick access to easy-to-understand screen menus with a variety of options for customization. In addition to the above features, HITACHI S-9300 is able to analyze samples in a variety of methods, such as energy dispersive x-ray spectroscopy and electron backscattered diffraction. Furthermore, HITACHI S9300 is also certified to operate in clean rooms, making this device ideal for use in the fabrication and analysis of semiconductor devices. In conclusion, S 9300 is a highly effective and versatile scanning electron microscope, offering advanced features and sophisticated hardware for a variety of applications. With its high-precision optics, sophisticated motion control model, and real-time image capturing capabilities, S-9300 provides an ideal platform for observing and analyzing minute particles and structures.
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