Used JEOL JBX-9300FSZ #9236559 for sale
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ID: 9236559
E-Beam lithography system
Cassette loader and control computer
Power racks and HV tank
Manuals and schematics
Gaussian spot electron beam: 4nm diameter
Accelerating voltage: 50 kV / 100 kV
Current range: 50 pA - 100 nA
Scan speed: 50 MHz
Vertical range automatic focus: ±100 µm
Vertical range manual focus: ± 2 mm
ZrO With thermal field emission source
Vector scan for beam deflection
Maximum 300 mm (12") wafers with 9" of writing area
Line width writing at 100 kV: < 20 nm
Field stitching accuracy at 100 kV: < 20 nm
Overlay accuracy at 100 kV: < 25 nm.
JEOL JBX-9300FSZ is a scanning electron microscope (SEM) that offers high-performance imaging and analytical capabilities to the researcher. This tool will provide high-resolution temporal or cross-sectional imaging and excellent elemental analysis with features such as an automated sample handling equipment and high-resolution optics. The key components of JEOL JBX 9300FSZ include a high-resolution charged particle optics column, a high-sensitivity secondary electron detector, an automated sample-handling system and a focused ion beam (FIB). The optics column offers a maximum resolution of 0.4 nanometers and dynamic focusing down to 0.1 nanometers, allowing the user to make fine-grained images and elemental analysis of any sample. The secondary electron detector is capable of detecting electrons with an energy range from 0.1V to 30kV, allowing the user to get a high-resolution image of the sample. The automated sample-handling unit allows for automated loading and unloading of samples, as well as automated centering and calibration of the electron beam. JBX-9300FSZ also includes a high-speed scanning stage capable of scanning up to 10 mm per second, a wide variety of polarized detectors, a cryoprobe, and a selection of sample holders. The cryoprobe enables the user to image samples at temperatures as low as -247 °C, while the sample holders will hold samples ranging in size from 1 x 1 mm to 150 x 150 mm in size. The scanning stage also has vacuum compatible connectors for easy integration of Extract models for gas analysis. JBX 9300FSZ also offers a variety of software packages for analysis and image processing. These software packages include packages for image analysis and measurement, as well as packages for three-dimensional reconstruction. These programs offer advanced feature extraction and segmentation tools, as well as sophisticated graphical and numerical data visualization. Overall, JEOL JBX-9300FSZ is an excellent scanning electron microscope with advanced imaging and analytical capabilities. Its wide range of features make it ideal for high-resolution imaging and analysis of complex samples. These features, coupled with its impressive resolution and automated sample handling machine, make it an ideal choice for any researcher looking to obtain high-resolution images and elemental information.
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