Used KLA / TENCOR 8100 #9292623 for sale
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ID: 9292623
Wafer Size: 4"
Vintage: 1998
Critical Dimension Scanning Electron Microscopes (CD-SEM), 4"
Resolution: <4.5 nm
Electron source: Schottky, Thermal field emitter
Magnification: 2.34,000x - 400,000x
Stage: X-Y Leadscrew stage
Position accuracy: < 10 micron
Accelerating voltage: 0.4 kV - 1.5 kV
Throughput: Up to 40 wafers/hr
1998 vintage.
KLA / TENCOR 8100 is an advanced scanning electron microscope (SEM) offering the most advanced technologies in the field. It is a new generation of high-end SEMs that is designed to improve ease of use while providing excellent performance for both research and industrial applications. KLA 8100 has a wide range of features and capabilities which make it an invaluable tool for scientists and researchers alike. It has an automated platform for high throughput imaging, allowing users to rapidly collect data from a variety of samples. It also has an excellent energy dispersive X-ray (EDX) equipment which can be used for elemental analysis of the sample surface. This allows users to accurately determine the composition of the sample they are studying. TENCOR 8100 utilizes a novel digital imaging system called Digital Imaging Stereography (DIS). This unit contains a digital camera, a stepper motor, and a stage scanning mechanism, allowing for high speed scanning with very precise position control. The DIS allows for detailed visual inspection of fine features on the sample surface. 8100 is equipped with fully automated sample manipulation capabilities allowing for different tasks to be completed without user intervention. With an onboard specimen manipulation machine, users can quickly and easily attach, move, tilt, and rotate their samples in order to scan it from different angles. This allows for complete 3D imaging and analysis of the sample. KLA / TENCOR 8100 also has a range of environmental control features, meaning it can be used in a variety of environmental conditions. It has pumps, vaporizers, and humidity sensing technologies to allow for the precise measurements of the environment it is working in. This allows users to fine-tune the tool for even more accurate imaging and analysis. Overall, KLA 8100 is a state-of-the-art scanning electron microscope offering many features that are beneficial to both research and industrial applications. It is an excellent choice for those needing an extremely precise imaging and analysis asset.
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