Used KLA / TENCOR 8100XP #9225281 for sale
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ID: 9225281
Wafer Size: 8"
Vintage: 2000
Critical Dimension Scanning Electron Microscope (CD-SEM), 8"
Load ports: ASYST-3LP
Standard chuck
Etch module
Copper process
CE Marked
2000 vintage.
KLA / TENCOR 8100XP is a Scanning Electron Microscope (SEM) designed to provide high resolution images of surfaces down to nanoscale resolution. The equipment is equipped with a hyper-detector and in-lens detector in order to maximize the resolution. The system's resolution can reach 2.0 nanometers in secondary electron mode, and 4.0 nanometers for backscattered electrons. KLA 8100XP features a SampleID stage which is a reliable and advanced sample staging and mapping technology. It is capable of X-Y scanning 200mm area, Z-axis movement, tilt capability, and auto-focus. TENCOR 8100 XP features an imaging unit designed to capture high resolution images, including both secondary electrons and backscattered electrons. The machine also includes an EDS Tool for Energy Dispersive Spectroscopy. This device can be used to help differentiate between materials based on elements and characterizing the chemical composition of surfaces. Additionally, 8100 XP features an integrated variable-pressure SEM that allows for analysis at various pressures, and a low-vacuum option for analysis of insulating and organic materials. KLA / TENCOR 8100 XP's optical asset features an in-lens detector and an annular detector for consistent high resolution imaging. The model's 8-inch, square vacuum chamber allows for larger sample sizes to be accommodated with ease. It is equipped with auto-focus and auto-stigmation capabilities which provide a steady baseline for imaging. The equipment is driven and operated by a Windows-based software platform with a wide range of image manipulation functions. KLA 8100 XP is a reliable and highly precise scanning electron microscope, allowing users to capture images with nanoscale resolutions. Its integrated sample staging technology and unique imaging capabilities provide researchers and engineers with the tools necessary to investigate and map the composition and structure of variety of different material surfaces. This system is well-suited for nano-scale materials analysis and imaging at high resolution.
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