Used KLA / TENCOR 8100XP #9225706 for sale

ID: 9225706
Wafer Size: 8"
Vintage: 1996
Critical Dimension Scanning Electron Microscope (CD-SEM), 8" Load ports: ASYST-3LP Standard chuck Etch module Copper process CE Marked 1996 vintage.
KLA / TENCOR 8100XP is a critical dimension (CD) scanning electron microscope (SEM) designed for the most demanding metrology applications in the semiconductor industry. It comes equipped with the industry-leading resolution of CD measurement and superior image quality. KLA 8100XP provides an array of features and capabilities making it one of the premier high-resolution imaging instruments. TENCOR 8100 XP is equipped with a high-resolution Everhart-Thornley secondary electron detector, allowing users to capture the most detailed images of small-scale features with high contrast and sharpness. The SEM features a high-performance Hamilton motorized deflector system and an advanced navigation probe, both of which enable the precise placement of the beam to ensure defect-free samples. The instrument offers hardware-based pattern recognition algorithms, enabling fast and accurate annotation of features on scanned samples. KLA 8100 XP also features the "Monte Carlo" particle simulator. This unique technology can simulate and predict how the beam is deflected, scattered and absorbed by small-scale features on a sample. This allows users to optimize parameters to improve image quality. The SEM also offers a number of other capabilities to improve workflow efficiency and sample accuracy. The "SmartSmart Point" feature enables users to quickly and accurately measure small features without the need for complex calibration. It also has a "Spot Counting" feature which allows for the easy measurement of small particle size defects, and a "Carryover" capability that enables the analysis of different patterns on the same sample. KLA / TENCOR 8100 XP is user friendly, easy to maintain and highly automated, making it ideal for the extremely demanding semiconductor metrology environment. It offers unparalleled dependability that keeps it running even in the most adverse conditions. 8100 XP is a reliable and powerful tool for any semiconductor metrology application.
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