Used KLA / TENCOR EV200 #9224227 for sale
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ID: 9224227
Wafer Size: 12"
Defect review SEM, 12"
No robots
Parts included:
BROOKS Controllers
Computer
Power supply unit
Leadscrew
(2) Load stations.
KLA / TENCOR EV200 is an advanced scanning electron microscope (SEM) designed for high-resolution imaging of a variety of sample materials. The imaging and analytical capabilities of KLA EV200 provide users with an unparalleled level of detail, allowing them to better understand the physical and chemical properties of their samples, thus unlocking valuable insights and leading to more informed decisions. TENCOR EV200 features a large chamber which is capable of supporting samples up to 30 mm in diameter, allowing the observation of large and complex structures. The instrument's advanced optical system uses variable-angle SEM imaging to provide users with a range of fields-of-view from 25X to 360X. Furthermore, the integrated EDX detector allows for precise elemental analyses without manually transferring the sample to an external system. EV200 incorporates a side-entry gun with a highly stable and high-resolution spot resolution of 30 nm at 20 keV. This allows for excellent beam emittance control and exceptional sensitivity, allowing imaging with ultimate accuracy and precision. Additionally, the unique row-column addressing system allows users to drastically reduce scanning times and decreases imaging errors. KLA / TENCOR EV200 is equipped with a variety of data management features for easy analysis of results and efficient sharing of images. The user-friendly graphical interface allows samples to be easily manipulated in three dimensions, providing an understanding of incredibly complex structures. This intuitive user interface can also be adapted to specific user requirements, allowing for enhanced customisation and adaptability. Thanks to its intuitive operation and advanced imaging capabilities, KLA EV200 is the ideal tool for research, measurements, and analysis in a variety of scientific fields including materials science, nanotechnology, and semiconductors. With its unparalleled capabilities, TENCOR EV200 allows for a deeper understanding of physical properties, faster operational control, and improved predictive skills, enabling increased productivity and efficiency in the laboratory.
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