Used TOSHIBA / NUFLARE EBM-3500 #293817976 for sale
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ID: 293817976
Electron beam lithography system
Covers
Input/Output (I/O) arm
Remote Monitoring System (RMS)
Extra High Voltage (EHV) cabinet
Automatic Lens Control (ALC) cabinet
Analog Control Processor (ACP) cabinet
Vacuum & Alignment Logic (VAL) cabinet
Electron Optical Controller (EOC) cabinet
Data Path Writer (DPW) cabinet
Motion & Alignment Control (MAC) cabinet
Pattern Data Formatter (PDF) cabinet
PRX cabinet
Power Control Unit (PCU)
Transformer Rectifier Unit (TRU)
Chiller
Environmental Warning System (EWS)
(3) Dry pumps
Orion
(6) Exhaust covers
(8) Sub‑controller boxes (SUB), AMP boxes
Cables
Standard Mechanical Interface (SMIF) loader.
TOSHIBA / NUFLARE EBM-3500 is a scanning electron microscope (SEM) that offers techniques such as secondary electron imaging, backscattered electron imaging, and energy dispersive x-ray spectroscopy (EDS). The SEM has a large field of view (FOV) of up to 25mm and a high quality imager that can achieve a resolution of 1.0 nm. Its EDS system offers high spectral resolution and accuracy for x-ray mapping and elemental analysis. The SEM is equipped with a cold field emission gun (CFEG) which allows for low beam current imaging, high resolution imaging, and low cathode damage. The high quality scanning electron optics are designed to minimize astigmatism and coma, while also providing a large depth of field and wide range of working distance. The SEM is equipped with a variety of control and analysis software packages that provide users with a comprehensive set of features. These packages provide functions such as automated image stitching, image sharpening, and spectrogram plotting. TOSHIBA EBM-3500 is also equipped with a wafer handler which provides automated substrates exchange. The system supports up to 150 mm, 200 mm, and 300 mm wafers that can be scanned at speeds up to 20 ms/pixel. The SEM includes a specimen chamber with an innovative sample balcony for easy access and operation. It is capable of operating in temperatures ranging from -20°C to 15°C. NUFLARE EBM-3500 features an upgraded computer system, user-friendly interface, and print driver. It is designed to be easy to use and maintain. EBM-3500 scanning electron microscope is a powerful and versatile tool designed to enable scientific exploration and knowledge in many areas such as materials science, nanotechnology, semiconductor manufacturing, metallurgy, and more. Its combination of features, including precise imaging capability, element identification, and easy operation make it an ideal choice for research, industry, as well as educational purposes.
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