Scanning Electron Microscope (SEM)
E-Beam range: 0.5 kV to 30 kV
EDWARDS XDS35i Pump
EATON 9SX 6000 UPS
VAN DER HEIJDEN Chiller
Evactron plasma cleaner
Anti-vibration platform
EMI Cage
PC
Detectors:
SE2 Detector
BSD Detector
In-lens detector.
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