Used DISCO DFD 640 #9266371 for sale

DISCO DFD 640 is a scribing/dicing equipment engineered by DISCO Corporation and designed for professional industrial use in semiconductor and device manufacturing. The system consists of three main components - a substrate holder, a scribing head and a motion control unit - each integrated in a 6-axis layout. The substrate holder takes samples of up to 8" x 8" that are then secured on the holder via an air cushion unit. This cushion machine creates a vacuum through the holder, helping minimise the effect of thermal expansion. This ensures accurate measurements from each sample. The scribing head is the core of the tool which features a high-resolution X-Y single point scanning asset with a UV laser as its light source. This laser is capable of up to 1µm resolution in each axis, providing impeccable accuracy when scribing double-sided patterns. To increase accuracy, the scribing head also incorporates an Automatic Feature Recognition (AFR) model that automatically adjusts the laser position according to the contour of the sample. The motion control unit is responsible for precise movement across the substrate surface. It is equipped with a precision-motor encoder and a micro-stepping driver which results in detailed, precise pattern scribing. The unit also enables the equipment to move along X-Y-Z axes, with speeds of up to 8 m/s. The system also comes with integrated software that allows it to be used in combination with a two-dimensional mask editor for controlling scribing operations. Additionally, embedded process control software in the unit allows it to provide detailed inspection and analysis of the scribed patterns after processing. Overall, DISCO DFD640 is a powerful machine that features high speed, accuracy and reliability. It is suitable for both mass production and low-volume scribing and dicing and is an advantageous tool for manufacturing in the semiconductor industry.