Used KARL SUSS / MICROTEC HR-100 #9156276 for sale

ID: 9156276
Wafer Size: 4"
Scriber, 4".
KARL SUSS / MICROTEC HR-100 is a high-resolution scribing and dicing equipment designed for use in the semiconductor industry. It is designed for the most precise material processing and is particularly suited for singulation of very small dies. Its powerful sweeping, scanning, and fine focusing system enables the precise positioning of precision tools in three dimensions. MICROTEC HR-100 unit consists of a motorized three-axis scanning machine that enables the cutting of intricate geometries due to its four-step optical zoom tool. A rotary table is included and provides up to two-dimensional sample rotations over 180°C. It is able to scribe up to 8x8 inch substrates with a resolution of 40 microns. It also features a CCD line sensor for precision positioning of blades with respect to a sample which in combination with its four-step optical zoom guarantees accurate focus in areas of high detail. The scribing/dicing asset also incorporates an optical microscope with a customizable zoom factor and special filters to ensure the micro cutting accuracy and repeatability to ensure its high precision capabilities. The model's high-powered micropositioning laser allows for extremely accurate cutting of complex geometries with a resolution of 10 microns. KARL SUSS HR-100 equipment also implements a microdie vacuum chucking stage with an integrated dry pump to securely hold wafers while they are cut. It also includes inspection and diagnostic software to ensure optimal cutting results. Overall, HR-100 is a powerful and precise scribing and dicing system that is designed for the most demanding material processing tasks. The high resolution, motorised three-axis scanning, and integrated microdie vacuum chucking ensures optimal cutting results and repeatable precision. It's the ideal unit for singulating very small dies and for achieving complex geometries with accuracy and repeatability.
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