Used RENA InWaClean #9096767 for sale
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ID: 9096767
Vintage: 2008
Wafer washing machine,
Configured for (8) lanes of 156mm X 156 mm wafers
2000 Wafers/hr.
Power: 380-400V AC +5% 3Ph+N+PE, 50 Hz 138A (full power)
CDA: Approx. 10 Nm³/h compressed air for pneumatics and rinse components
Approx. 80 Nm³/h clean dry air for wafer dryer,
DI Water: DI without DI-reprocessing stage approx. 4.0 m³/h ave, 12.0 m³/h peak
Process Exhaust: Approx. 2,000 m³/h
Internet Connection: Ethernet
Process Drain: approx. 4.0 m³/h ave, 12.0 m³/h peak
Detergent / Surfactant Consumption approx. 0,6 l/h
Chilled Water: 120 l/min (peak) 90 l/min ave
2008 vintage.
RENA InWaClean is a state-of-the-art solar production equipment designed to maximize the efficiency of solar cell production. It is an innovative machine intended for photovoltaic (PV) cell manufacturing processes related to epitaxy, doping, etching, thin film material deposition, and other automated operations. InWaClean offers two main features: first, it allows for the controlled deposition of exceptionally thin layers of material, such as phosphorus and boron for the diffusion of dopant gases. Secondly, its automated cleaning technology uses an optimized vacuum equipment and plasma treatments to reduce particles and contaminants from the wafers. This significantly reduces the time required for cleaning without compromising the quality of the resulting cells. RENA InWaClean is a reliable and high-performance system, capable of producing wafers up to 8 inch diameter at speeds of up to 6900 wafers per hour. Its advanced automation ensures repeatable processes with precise control across every process step. The integrated visual control unit combines automated defect detection with manual intervention to eliminate errors—ensuring the cleanliness and accuracy of cells produced. Energy usage is minimized through advanced technological components such as the S50 controller, an all-in-one machine controller, and the HFS, a high-efficiency filtration machine. Together, these components ensure efficient energy use with minimized environmental impact. InWaClean is easy to install and operate, with a user-friendly visual interface and menu-driven windows. Built-in diagnostics monitor operational performance to alert the operator of any potential issues, while data analysis and production statistics are saved for future review. RENA InWaClean is a revolutionary solar production equipment designed with the latest technology to optimize the production of high-quality solar cells. The reliable automation and advanced cleaning technology ensures reliable performance, high levels of accuracy, and minimized energy usage. Thanks to its user-friendly interface, it is simple to operate for anyone and is a great choice for any PV process laboratory.
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