Used ROTH & RAU DEPx1500 #185721 for sale

ROTH & RAU DEPx1500
ID: 185721
System Throughput of 1500 wafers per hour.
ROTH & RAU DEPx1500 is a versatile solar production equipment designed for high performance and maximum throughput. This production machinery is designed for continuous operation in a wide variety of applications including high-efficiency back surface solar cell production. This solar production equipment is equipped with a flexible processing module platform to allow high-quality processing of silicon wafers. Its advanced process automation feature can automatically process multiple cells simultaneously and allows users to set specific automated routines to minimize production time and maximize throughput. DEPx1500 uses etch and deposition technology for processing. The etch technology removes silicon from the top layer of the wafer and deposits silicon on the underlying layer. During the etching process the device produces uniform line patterns with minimal redeposition, deep uniform trenches and high etch rates. The device also has a deposition feature to deposit films such as silicon nitride, silicon dioxide, and amorphous silicon with uniformity. ROTH & RAU DEPx1500 is designed for high speed and low defect production. It is equipped with a large worktable and energy efficient pumping system for faster cycles. The vacuum system is designed to provide temperature uniformity and uniform pressure. It also has an automated wafer mapping machine which can measure the surface topography of the wafers of a given process condition. DEPx1500 also includes integrated quality control and defect inspection systems to reduce wastage. Its laser-based defect inspection systems can detect missing or misaligned surface features and particle contaminations. The software-controlled parameters provide precise control and precise process reproducibility. Moreover, ROTH & RAU DEPx1500 is designed with advanced safety features. It has a securely bonded baseplate that prevents wafer damage and safeguards against potential electrical and thermal hazards. The high-end temperature management system further prevents temperature losses and ensures that the substrate and process temperature are maintained in accordance with the specified process parameters. This makes DEPx1500 a safe and reliable solar production equipment.
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