Used AMAT / APPLIED MATERIALS 0190-22355 Rev.003 #9204716 for sale
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ID: 9204716
Wafer Size: 12"
Vintage: 2006
Poly chamber for DPS metal, 12"
2006 vintage.
AMAT 0190-22355 Rev.003 is a reactor designed primarily for use in vacuum systems. It is constructed out of stainless steel and is capable of handling pressures up to 10-6 torr. The reaction chamber of the reactor is cylindrical and is sealed from the outside via a threaded connection equipped with a vacuum-tight O-ring seal. The reactor is fitted with two ports at one side which contains 3K flanges that are used for introducing gas and heated vaporized materials into the reaction chamber. The reactor's reaction chamber is equipped with insulation material to maintain a uniform temperature inside. This enables the user to be able to work with various temperatures ranging from 25°C room temperature up to 1000°C using high temperature electric furnaces. The reactor can be connected directly to other analytical instruments such as mass spectrometers, gas chromatographs and optical emission spectrometers to create a fully functional vacuum process. The reactor's insulation material contains plastic-coated quartz plates. The plates are electrically heated using two concentric coils surrounding the reactor. This ensures homogenous heating of the reaction chamber, creating an even temperature across the whole chamber despite the presence of hot spots. The reactor also contains a working wall of aluminum oxide, titanium coated quartz, graphite, and boron nitride that protect the reactor from heated vapours, gases, and material deposits. The reactor is capable of processing multiple materials such as silane, chlorine, and hydrogen fluoride. It also has the ability to be used for many different applications such as oxidation and plasma etching. The chamber has no minimum size requirement and is highly adjustable, meaning the user can control the size and shape to suit the application. The approximate usable volume is 0.5 to 2 liters. The reactor is also fitted with temperature control features, allowing for precise control of the temperature inside the chamber. All in all, APPLIED MATERIALS 0190-22355 Rev.003 is a highly capable reactor designed for use in a variety of applications. Its adjustable chamber, homogenous temperature control, and multiple material compatibility make it an ideal choice for any vacuum application.
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