Used ASML PAS 5500 / 850 #9186902 for sale

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Manufacturer
ASML
Model
PAS 5500 / 850
ID: 9186902
Reticles 2000-2012 vintage.
ASML PAS 5500 / 850 is a type of wafer stepper which is used in the semiconductor manufacturing process. It is used for repetitively imaging a pattern onto the top surface of a wafer, usually for the production of integrated circuits. PAS 5500 / 850 uses a combination of advanced optics, high accuracy positioning systems, and precise wafer manipulation mechanisms to image dies onto semiconductor wafers. The equipment consists of a pre-aligner and an aligner, along with a scan mirror and aperture lens, which works with the laser-based maskless source and detector. The pre-aligner is used for accurate positioning of the die on the wafer, using laser light and image recognition. The pre-aligner is also used to detect die defects. The aligner achieves higher accuracy with a servo-driven control system. The scan mirror and aperture lens are used to coordinate the optics setup with the maskless source and detect the pattern. ASML PAS 5500 / 850 is also equipped with a variety of setting and control features. It has a high accuracy stage for precise alignment of the die to the pattern on the wafer. It also has an anti-reflection coating feature to reduce the light bounce-off of the wafer surface. Furthermore, the unit includes an auto-focus feature that can automatically adjust the image focusing so that higher image resolution can be achieved. For processes such as photolithography, the machine comes with an additional module which is connected to the stepper. This module is responsible for developing the resist, which is used to transfer the pattern from the mask onto the wafer. Additionally, PAS 5500 / 850 is capable of supporting multiple wafer sizes, and the tool includes algorithms for adjusting the needed exposure dose to maintain consistent results for different sized wafers. Overall, ASML PAS 5500 / 850 wafer stepper is an essential piece of hardware for the semiconductor industry. It combines several systems and technologies to offer a reliable and accurate imaging process for integrated circuit production. By utilizing sophisticated optics, accurate positioning, automatic focusing, and adjustable exposure doses, semiconductor manufacturers are able to create high quality electronic components.
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