Used KLA / TENCOR Aleris 8350 #9375870 for sale
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ID: 9375870
Wafer Size: 12"
Vintage: 2012
Film thickness measurement system, 12"
CIM: SECS GEM
Standard handler
Factory interface: (3) FOUPs
2012 vintage.
KLA / TENCOR Aleris 8350 is a high sensitivity wafer testing and metrology equipment designed to enable precise analysis of wafer uniformity with high resolution. The system is used in the semiconductor manufacturing process to ensure consistent product quality. KLA Aleris 8350 offers a suite of metrology tools for wafer testing, including a surface profiler, optical CD measurement tool, and a particle detector. The surface profiler measures critical dimensions and thicknesses of wafer features such as trenches, gates, and dummy structures. The optical CD measurement tool offers high sensitivity and accuracy for the measurement of line width, space width, depth and profile over various layer depths. The particle detector is capable of detecting particles down to 10nm, enabling rejection of any particles that might contaminate the wafer surface. The unit is equipped with a high resolution camera that provides high-resolution images of wafer shapes, and UV light for viewing defects, such as voids, defects, and particles. The machine can also be used to monitor process parameters, such as etching rate and chamber pressure. TENCOR Aleris 8350 is equipped with a proprietary image processing algorithm to ensure that data is collected and interpreted accurately. This algorithm processes images to add features, detect defects, and measure line width, space width, and layer thickness consistently and accurately. The tool includes an automated software for data acquisition, analysis, and reporting. It can be used to record test results, and generate data reports in a variety of formats, including PDF and Microsoft Excel. The asset can also be used to monitor wafer shape and condition with real-time displays for statistical information. Aleris 8350 provides wafer testing and metrology solutions with high accuracy, precision, and repeatability. It is an important tool in the semiconductor manufacturing process for ensuring consistent product quality. This model can be used to collect reliable data and generate reports in order to drive optimization and consistency.
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